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• W2067103417 abstract "X-ray microdiffraction (XRMD) measurements using the AlN 22¯01 and 12¯10 Bragg reflections were performed to determine the cross-sectional distribution of local residual strain and twisting of crystal domains for a thick AlN film grown on a trench-patterned AlN/α-Al2O3 template. The distribution of the strain components in the [0001] and [112¯0] directions, which are perpendicular to the trench lines, was strongly influenced by the presence of voids caused by the trench pattern. The strains in the [11¯00] and [112¯0] directions determined using the two Bragg reflections were found to be significantly different, and this was shown to be the result of twisting of the crystal domains about the [0001] axis under the influence of anisotropic shear stress in the prismatic planes." @default.
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• W2067103417 date "2013-10-01" @default.
• W2067103417 modified "2023-10-18" @default.
• W2067103417 title "Cross-sectional X-ray microdiffraction study of a thick AlN film grown on a trench-patterned AlN/α-Al2O3 template" @default.
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• W2067103417 doi "https://doi.org/10.1016/j.jcrysgro.2013.07.012" @default.
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