Matches in SemOpenAlex for { <https://semopenalex.org/work/W2067156749> ?p ?o ?g. }
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- W2067156749 endingPage "756" @default.
- W2067156749 startingPage "754" @default.
- W2067156749 abstract "We studied reaction kinetics in synchrotron radiation excited chemical vapor deposition of Si using disilane. It was found that the growth rate depends on temperature in the irradiated region but not in the nonirradiated region. Growth in the irradiated region occurs as a result of photolysis of disilane molecules weakly trapped on the surface followed by the formation of a hydrogenated Si network. On the other hand, in the nonirradiated region, growth occurs as a result of layer-by-layer sticking and the elimination of surface hydrogen by a fragment species generated by photolysis of gas-phase disilane. The reaction model is consistent with properties of the grown Si film." @default.
- W2067156749 created "2016-06-24" @default.
- W2067156749 creator A5024064783 @default.
- W2067156749 creator A5056946407 @default.
- W2067156749 creator A5081457988 @default.
- W2067156749 date "1994-02-07" @default.
- W2067156749 modified "2023-10-16" @default.
- W2067156749 title "Gas and adsorbate excitation pathways in synchrotron radiation excited Si growth using disilane" @default.
- W2067156749 cites W1966112728 @default.
- W2067156749 cites W1987343800 @default.
- W2067156749 cites W2014206557 @default.
- W2067156749 cites W2042681725 @default.
- W2067156749 cites W2046814683 @default.
- W2067156749 cites W2049782475 @default.
- W2067156749 cites W2059978376 @default.
- W2067156749 cites W2078738116 @default.
- W2067156749 doi "https://doi.org/10.1063/1.111056" @default.
- W2067156749 hasPublicationYear "1994" @default.
- W2067156749 type Work @default.
- W2067156749 sameAs 2067156749 @default.
- W2067156749 citedByCount "13" @default.
- W2067156749 crossrefType "journal-article" @default.
- W2067156749 hasAuthorship W2067156749A5024064783 @default.
- W2067156749 hasAuthorship W2067156749A5056946407 @default.
- W2067156749 hasAuthorship W2067156749A5081457988 @default.
- W2067156749 hasConcept C111337013 @default.
- W2067156749 hasConcept C120665830 @default.
- W2067156749 hasConcept C121332964 @default.
- W2067156749 hasConcept C16332341 @default.
- W2067156749 hasConcept C178790620 @default.
- W2067156749 hasConcept C181500209 @default.
- W2067156749 hasConcept C184779094 @default.
- W2067156749 hasConcept C185544564 @default.
- W2067156749 hasConcept C185592680 @default.
- W2067156749 hasConcept C2776259327 @default.
- W2067156749 hasConcept C512968161 @default.
- W2067156749 hasConcept C544956773 @default.
- W2067156749 hasConcept C54582936 @default.
- W2067156749 hasConcept C57410435 @default.
- W2067156749 hasConcept C75473681 @default.
- W2067156749 hasConceptScore W2067156749C111337013 @default.
- W2067156749 hasConceptScore W2067156749C120665830 @default.
- W2067156749 hasConceptScore W2067156749C121332964 @default.
- W2067156749 hasConceptScore W2067156749C16332341 @default.
- W2067156749 hasConceptScore W2067156749C178790620 @default.
- W2067156749 hasConceptScore W2067156749C181500209 @default.
- W2067156749 hasConceptScore W2067156749C184779094 @default.
- W2067156749 hasConceptScore W2067156749C185544564 @default.
- W2067156749 hasConceptScore W2067156749C185592680 @default.
- W2067156749 hasConceptScore W2067156749C2776259327 @default.
- W2067156749 hasConceptScore W2067156749C512968161 @default.
- W2067156749 hasConceptScore W2067156749C544956773 @default.
- W2067156749 hasConceptScore W2067156749C54582936 @default.
- W2067156749 hasConceptScore W2067156749C57410435 @default.
- W2067156749 hasConceptScore W2067156749C75473681 @default.
- W2067156749 hasIssue "6" @default.
- W2067156749 hasLocation W20671567491 @default.
- W2067156749 hasOpenAccess W2067156749 @default.
- W2067156749 hasPrimaryLocation W20671567491 @default.
- W2067156749 hasRelatedWork W1983935286 @default.
- W2067156749 hasRelatedWork W1995423610 @default.
- W2067156749 hasRelatedWork W2065516818 @default.
- W2067156749 hasRelatedWork W2067156749 @default.
- W2067156749 hasRelatedWork W2074945085 @default.
- W2067156749 hasRelatedWork W2104892912 @default.
- W2067156749 hasRelatedWork W2162175307 @default.
- W2067156749 hasRelatedWork W2906544780 @default.
- W2067156749 hasRelatedWork W2949918193 @default.
- W2067156749 hasRelatedWork W3004638923 @default.
- W2067156749 hasVolume "64" @default.
- W2067156749 isParatext "false" @default.
- W2067156749 isRetracted "false" @default.
- W2067156749 magId "2067156749" @default.
- W2067156749 workType "article" @default.