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- W2067264216 abstract "In order to raise an ion extraction efficiency from a plasma, a new method using an rf field has been proposed and demonstrated. The resonant frequencies of the rf field were theoretically evaluated to excite the eigenwave of the plasma. The lower frequency of the two plasma-sheath resonances under the magnetic field was selected because it has hardly any dependence on the plasma density when the density is over a critical value. Verification of this method was carried out using Xe discharge plasma (electron density, 1×1016 m−3; electron temperature, 8 eV) between the parallel plate electrodes (length, 0.5 m). The resonance was found at about 10 MHz, which agreed with the theoretical result. The ion current at the resonance was anisotropic and was twice as large as the ion saturated current, which is the limiting value of the conventional electrostatic method." @default.
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- W2067264216 date "1996-12-01" @default.
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- W2067264216 title "Ion extraction from plasma by using a radio frequency resonant electric field" @default.
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