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- W206750897 abstract "The method of radiation conductivity induced by fast electrons was used to study the mechanism and kinetics of accumulation of radiation damage in silicon during implantation of 30-keV He, C, N, Ne, Si, Ar, and Kr ions. The experimental curves allowed us to determine the change in the number of radiation defects on increase in the ion dose, as a function of the implanted ion mass and of the target temperature. The amorphization dose of silicon was determined for 30 keV ions at substrate temperatures 300 and 100 /sup 0/K." @default.
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- W206750897 date "1982-08-01" @default.
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- W206750897 title "Kinetics of accumulation of radiation damage during ion implantation of silicon" @default.
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