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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2067652013> ?p ?o ?g. }

• W2067652013 endingPage "521" @default.
• W2067652013 startingPage "515" @default.
• W2067652013 abstract "This paper present a two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation using tilted air jets. The device is composed of three layers stacked together, two micro-machined silicon wafers and a Pyrex glass wafer. The system is composed of a set of micro-conveyors in about 9 mm × 9 mm area. Each micro-conveyor has four nozzles and can generate tilted air-jets which allow four conveyance directions. An experiment of the conveyance of a silicon chip of 3 mm diameter and weighing approximately 2 mg was performed with pulsed air flow." @default.
• W2067652013 created "2016-06-24" @default.
• W2067652013 creator A5030408530 @default.
• W2067652013 creator A5039389306 @default.
• W2067652013 creator A5050042238 @default.
• W2067652013 creator A5062003518 @default.
• W2067652013 date "2012-08-01" @default.
• W2067652013 modified "2023-09-30" @default.
• W2067652013 title "A MEMS-based pneumatic micro-conveyor for planar micromanipulation" @default.
• W2067652013 cites W1963968824 @default.
• W2067652013 cites W1987501197 @default.
• W2067652013 cites W2004080102 @default.
• W2067652013 cites W2015086944 @default.
• W2067652013 cites W2050713352 @default.
• W2067652013 cites W2051570696 @default.
• W2067652013 cites W2055928947 @default.
• W2067652013 cites W2123517487 @default.
• W2067652013 cites W2131128580 @default.
• W2067652013 cites W2145301831 @default.
• W2067652013 cites W2152395261 @default.
• W2067652013 cites W2173222489 @default.
• W2067652013 cites W2481983768 @default.
• W2067652013 cites W2539085412 @default.
• W2067652013 doi "https://doi.org/10.1016/j.mechatronics.2011.04.005" @default.
• W2067652013 hasPublicationYear "2012" @default.
• W2067652013 type Work @default.
• W2067652013 sameAs 2067652013 @default.
• W2067652013 citedByCount "26" @default.
• W2067652013 countsByYear W20676520132012 @default.
• W2067652013 countsByYear W20676520132013 @default.
• W2067652013 countsByYear W20676520132014 @default.
• W2067652013 countsByYear W20676520132015 @default.
• W2067652013 countsByYear W20676520132016 @default.
• W2067652013 countsByYear W20676520132017 @default.
• W2067652013 countsByYear W20676520132018 @default.
• W2067652013 countsByYear W20676520132019 @default.
• W2067652013 countsByYear W20676520132020 @default.
• W2067652013 countsByYear W20676520132021 @default.
• W2067652013 countsByYear W20676520132022 @default.
• W2067652013 countsByYear W20676520132023 @default.
• W2067652013 crossrefType "journal-article" @default.
• W2067652013 hasAuthorship W2067652013A5030408530 @default.
• W2067652013 hasAuthorship W2067652013A5039389306 @default.
• W2067652013 hasAuthorship W2067652013A5050042238 @default.
• W2067652013 hasAuthorship W2067652013A5062003518 @default.
• W2067652013 hasConcept C116067010 @default.
• W2067652013 hasConcept C119599485 @default.
• W2067652013 hasConcept C121684516 @default.
• W2067652013 hasConcept C127413603 @default.
• W2067652013 hasConcept C134786449 @default.
• W2067652013 hasConcept C136525101 @default.
• W2067652013 hasConcept C142724271 @default.
• W2067652013 hasConcept C145667562 @default.
• W2067652013 hasConcept C160671074 @default.
• W2067652013 hasConcept C170401851 @default.
• W2067652013 hasConcept C172707124 @default.
• W2067652013 hasConcept C192562407 @default.
• W2067652013 hasConcept C204787440 @default.
• W2067652013 hasConcept C2777380305 @default.
• W2067652013 hasConcept C2983805867 @default.
• W2067652013 hasConcept C37977207 @default.
• W2067652013 hasConcept C41008148 @default.
• W2067652013 hasConcept C49040817 @default.
• W2067652013 hasConcept C544956773 @default.
• W2067652013 hasConcept C56200935 @default.
• W2067652013 hasConcept C71924100 @default.
• W2067652013 hasConcept C78519656 @default.
• W2067652013 hasConceptScore W2067652013C116067010 @default.
• W2067652013 hasConceptScore W2067652013C119599485 @default.
• W2067652013 hasConceptScore W2067652013C121684516 @default.
• W2067652013 hasConceptScore W2067652013C127413603 @default.
• W2067652013 hasConceptScore W2067652013C134786449 @default.
• W2067652013 hasConceptScore W2067652013C136525101 @default.
• W2067652013 hasConceptScore W2067652013C142724271 @default.
• W2067652013 hasConceptScore W2067652013C145667562 @default.
• W2067652013 hasConceptScore W2067652013C160671074 @default.
• W2067652013 hasConceptScore W2067652013C170401851 @default.
• W2067652013 hasConceptScore W2067652013C172707124 @default.
• W2067652013 hasConceptScore W2067652013C192562407 @default.
• W2067652013 hasConceptScore W2067652013C204787440 @default.
• W2067652013 hasConceptScore W2067652013C2777380305 @default.
• W2067652013 hasConceptScore W2067652013C2983805867 @default.
• W2067652013 hasConceptScore W2067652013C37977207 @default.
• W2067652013 hasConceptScore W2067652013C41008148 @default.
• W2067652013 hasConceptScore W2067652013C49040817 @default.
• W2067652013 hasConceptScore W2067652013C544956773 @default.
• W2067652013 hasConceptScore W2067652013C56200935 @default.
• W2067652013 hasConceptScore W2067652013C71924100 @default.
• W2067652013 hasConceptScore W2067652013C78519656 @default.
• W2067652013 hasIssue "5" @default.
• W2067652013 hasLocation W20676520131 @default.
• W2067652013 hasLocation W20676520132 @default.
• W2067652013 hasLocation W20676520133 @default.
• W2067652013 hasLocation W20676520134 @default.
• W2067652013 hasOpenAccess W2067652013 @default.
• W2067652013 hasPrimaryLocation W20676520131 @default.
• W2067652013 hasRelatedWork W1645944157 @default.
• W2067652013 hasRelatedWork W1989629659 @default.

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