Matches in SemOpenAlex for { <https://semopenalex.org/work/W2067688359> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2067688359 endingPage "2970" @default.
- W2067688359 startingPage "2965" @default.
- W2067688359 abstract "We report measurements of ion energy distributions of ionized species in titanium and aluminium filtered cathodic vacuum arcs operating in oxygen and nitrogen gas atmospheres. The ion energy distributions were recorded using a Hiden mass selected ion energy analyzer. The results show that a significant reduction in ion energies and a change in the shape of ion energy distributions occurs as the gas pressure is increased. The degree of the energy reduction depends on both the type of gas and the metal ions making up the arc plasma. This has important implications for the deposition of thin films, such as titanium nitride, commonly produced using vacuum arcs in reactive gas atmospheres. The ion energy distributions of the cathode ion species in the absence of background gas and at low gas pressures are well fitted by shifted Maxwellian distributions. As the gas pressure rises the distributions consist of a progressively increasing thermalized Maxwellian component and a decreasing shifted Maxwellian. An investigation of energy distributions of species in arcs triggered on alloyed cathodes showed that the relative abundance of ions of different charge states and their energy distributions varied as alloy metals were introduced. This indicates that the electron temperature in the cathode spot and hence the cathode spot dynamics is affected by the presence of the alloy metal." @default.
- W2067688359 created "2016-06-24" @default.
- W2067688359 creator A5003282197 @default.
- W2067688359 creator A5046816795 @default.
- W2067688359 creator A5064563285 @default.
- W2067688359 date "1998-03-15" @default.
- W2067688359 modified "2023-10-17" @default.
- W2067688359 title "Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs" @default.
- W2067688359 cites W1974133976 @default.
- W2067688359 cites W1976069107 @default.
- W2067688359 cites W2009136561 @default.
- W2067688359 cites W2014137241 @default.
- W2067688359 cites W2031214960 @default.
- W2067688359 cites W2049495779 @default.
- W2067688359 cites W2052349898 @default.
- W2067688359 cites W2052797772 @default.
- W2067688359 cites W2070424020 @default.
- W2067688359 cites W2070695153 @default.
- W2067688359 cites W2113501656 @default.
- W2067688359 cites W2123358858 @default.
- W2067688359 cites W2230587542 @default.
- W2067688359 doi "https://doi.org/10.1063/1.367052" @default.
- W2067688359 hasPublicationYear "1998" @default.
- W2067688359 type Work @default.
- W2067688359 sameAs 2067688359 @default.
- W2067688359 citedByCount "85" @default.
- W2067688359 countsByYear W20676883592012 @default.
- W2067688359 countsByYear W20676883592013 @default.
- W2067688359 countsByYear W20676883592014 @default.
- W2067688359 countsByYear W20676883592015 @default.
- W2067688359 countsByYear W20676883592016 @default.
- W2067688359 countsByYear W20676883592017 @default.
- W2067688359 countsByYear W20676883592018 @default.
- W2067688359 countsByYear W20676883592019 @default.
- W2067688359 countsByYear W20676883592020 @default.
- W2067688359 countsByYear W20676883592021 @default.
- W2067688359 countsByYear W20676883592022 @default.
- W2067688359 countsByYear W20676883592023 @default.
- W2067688359 crossrefType "journal-article" @default.
- W2067688359 hasAuthorship W2067688359A5003282197 @default.
- W2067688359 hasAuthorship W2067688359A5046816795 @default.
- W2067688359 hasAuthorship W2067688359A5064563285 @default.
- W2067688359 hasBestOaLocation W20676883591 @default.
- W2067688359 hasConcept C113196181 @default.
- W2067688359 hasConcept C121332964 @default.
- W2067688359 hasConcept C145148216 @default.
- W2067688359 hasConcept C147789679 @default.
- W2067688359 hasConcept C175721412 @default.
- W2067688359 hasConcept C178790620 @default.
- W2067688359 hasConcept C184779094 @default.
- W2067688359 hasConcept C185592680 @default.
- W2067688359 hasConcept C192562407 @default.
- W2067688359 hasConcept C43617362 @default.
- W2067688359 hasConcept C44441586 @default.
- W2067688359 hasConcept C49110097 @default.
- W2067688359 hasConcept C62520636 @default.
- W2067688359 hasConcept C82706917 @default.
- W2067688359 hasConcept C97355855 @default.
- W2067688359 hasConceptScore W2067688359C113196181 @default.
- W2067688359 hasConceptScore W2067688359C121332964 @default.
- W2067688359 hasConceptScore W2067688359C145148216 @default.
- W2067688359 hasConceptScore W2067688359C147789679 @default.
- W2067688359 hasConceptScore W2067688359C175721412 @default.
- W2067688359 hasConceptScore W2067688359C178790620 @default.
- W2067688359 hasConceptScore W2067688359C184779094 @default.
- W2067688359 hasConceptScore W2067688359C185592680 @default.
- W2067688359 hasConceptScore W2067688359C192562407 @default.
- W2067688359 hasConceptScore W2067688359C43617362 @default.
- W2067688359 hasConceptScore W2067688359C44441586 @default.
- W2067688359 hasConceptScore W2067688359C49110097 @default.
- W2067688359 hasConceptScore W2067688359C62520636 @default.
- W2067688359 hasConceptScore W2067688359C82706917 @default.
- W2067688359 hasConceptScore W2067688359C97355855 @default.
- W2067688359 hasIssue "6" @default.
- W2067688359 hasLocation W20676883591 @default.
- W2067688359 hasOpenAccess W2067688359 @default.
- W2067688359 hasPrimaryLocation W20676883591 @default.
- W2067688359 hasRelatedWork W1580781458 @default.
- W2067688359 hasRelatedWork W1617534506 @default.
- W2067688359 hasRelatedWork W202481706 @default.
- W2067688359 hasRelatedWork W2091949762 @default.
- W2067688359 hasRelatedWork W2591891037 @default.
- W2067688359 hasRelatedWork W2610925617 @default.
- W2067688359 hasRelatedWork W3040943442 @default.
- W2067688359 hasRelatedWork W4362663149 @default.
- W2067688359 hasRelatedWork W2083108293 @default.
- W2067688359 hasRelatedWork W2153032207 @default.
- W2067688359 hasVolume "83" @default.
- W2067688359 isParatext "false" @default.
- W2067688359 isRetracted "false" @default.
- W2067688359 magId "2067688359" @default.
- W2067688359 workType "article" @default.