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- W2067783427 abstract "In order to be commercially viable, the type-II superlattice (T2SL) LWIR focal plane array technology will require thedevelopment of effective passivation of exposed surfaces. Here we investigate the relationship between the thicknessand composition of the native oxide at the T2SL-SiO2 interface and the diode performance in terms of sidewallresistivity. Device performance is compared between samples with untreated surfaces, those for which the native oxideshave been removed at various intervals prior to SiO2 deposition, and samples for which oxide growth was promoted byozone exposure with and without a prior oxide strip. InAs- and GaSb-capped pieces were processed in an identicalmanner and studied using X-ray photoelectron spectroscopy (XPS). From these spectra, the compositions andthicknesses of the surface oxides just prior to SiO2 deposition were determined, complementing the electricalcharacterization of devices. Correlation of the performance and surface composition is presented." @default.
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- W2067783427 date "2011-01-22" @default.
- W2067783427 modified "2023-10-12" @default.
- W2067783427 title "Effect of the oxide-semiconductor interface on the passivation of hybrid type-II superlattice long-wave infrared photodiodes" @default.
- W2067783427 doi "https://doi.org/10.1117/12.876320" @default.
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