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- W2067797470 abstract "The process control of lightly doping polysilicon with Phosphine can be difficult. In high volume semiconductor manufacturing the equipment downtime and poor process performance associated with this type of process is expensive. Utilizing the volume fraction of the polysilicon test wafers, as measured on an ellipsometer, as input prior to dope, improvements to process performance and control as well as equipment downtime can be achieved." @default.
- W2067797470 created "2016-06-24" @default.
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- W2067797470 date "1999-04-23" @default.
- W2067797470 modified "2023-09-23" @default.
- W2067797470 title "Use of poly test wafer volume fraction as an input to control a diffusion poly doping process" @default.
- W2067797470 doi "https://doi.org/10.1117/12.346247" @default.
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