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- W2067807872 abstract "In this study, various MBE growth techniques for Cl doping were tried to obtain n-type ZnSeGaAs of high electrical and crystalline quality. The ZnSe layers with high Cl doping concentration which were grown by a conventional uniform doping method contained a high density of stacking faults and dislocations. The initial undoped ZnSe layer on the GaAs substrate played an important role in suppressing stacking faults in ZnSe;Cl layers. Electrochemical C-V and SIMS measurements showed that the electrical efficiency of incorporated Cl atoms in the ZnSe lattice was improved by the δ-doping method. The δ-doping technique was more efficient than the uniform and planar doping methods in improving the electrical and structural properties." @default.
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- W2067807872 date "1996-02-01" @default.
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- W2067807872 title "Electrical and structural properties of Cl-doped ZnSe MBE-grown with various doping techniques" @default.
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- W2067807872 doi "https://doi.org/10.1016/0022-0248(95)00577-3" @default.
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