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• W2067958082 abstract "Silicon monoxide vapor generated from Si/SiO{sub 2} mixed-powder compacts was used with NH{sub 3} to synthesize silicon nitride in a tubular flow reactor operated at temperatures in the range of 1,300--1,400 C. The ammonolysis of SiO with excess NH{sub 3} was very rapid, yielding three different types of silicon nitride at different longitudinal locations in the reactor: amorphous nanophase powder of an average size of about 20 nm, amorphous whiskers of a few micrometers in diameter, and {alpha}-polycrystals. The amorphous products were heat-treated for crystallization at temperatures between 1,300 and 1,560 C in a stream of dissociated NH{sub 3}, N{sub 2}, or N{sub 2}/H{sub 2} mixture gas. When dissociated NH{sub 3} was used, nanophase powder was crystallized at 1,300 C. The yield of nanophase silicon nitride from SiO varied from 13% to 43%, depending on operating conditions." @default.
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• W2067958082 date "1996-11-01" @default.
• W2067958082 modified "2023-09-27" @default.
• W2067958082 title "Kinetics of Silicon Monoxide Ammonolysis for Nanophase Silicon Nitride Synthesis" @default.
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• W2067958082 doi "https://doi.org/10.1111/j.1151-2916.1996.tb08730.x" @default.
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