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- W2067964852 abstract "We have previously shown that a copolymer of p-hydroxstyrene and p-acetoxymethylstyrene can be used as a sensitive deep UV resist. In that study we demonstrated that a formulation of this copolymer and an onium salt could be exposed, baked and developed in aqueous base to yield a high resolution negative tone relief image. In this paper we discuss a gas phase silylation process that converts this negative tone solvent-developable resist system into a positive tone dry-developable resist system. We have used an FT-IR microscope, coupled to a motorized X-Y stage, to study the silylation process as a function of UV exposure dose and silylation processing parameters. By altering the copolymer ratio, we found that resist contrast increased when the amount of acetoxymethylstyrene increased. This resist system and dry develop process were used to print 0.35 micrometers images at a DUV dose of approximately 25 mJ/cm<SUP>2</SUP>." @default.
- W2067964852 created "2016-06-24" @default.
- W2067964852 creator A5002152167 @default.
- W2067964852 creator A5004175607 @default.
- W2067964852 creator A5009564795 @default.
- W2067964852 creator A5011743989 @default.
- W2067964852 creator A5026998355 @default.
- W2067964852 creator A5068818684 @default.
- W2067964852 date "1993-09-15" @default.
- W2067964852 modified "2023-09-23" @default.
- W2067964852 title "<title>Positive-tone dry-develop resist based on crosslinking a phenolic resin</title>" @default.
- W2067964852 doi "https://doi.org/10.1117/12.154762" @default.
- W2067964852 hasPublicationYear "1993" @default.
- W2067964852 type Work @default.
- W2067964852 sameAs 2067964852 @default.
- W2067964852 citedByCount "0" @default.
- W2067964852 crossrefType "proceedings-article" @default.
- W2067964852 hasAuthorship W2067964852A5002152167 @default.
- W2067964852 hasAuthorship W2067964852A5004175607 @default.
- W2067964852 hasAuthorship W2067964852A5009564795 @default.
- W2067964852 hasAuthorship W2067964852A5011743989 @default.
- W2067964852 hasAuthorship W2067964852A5026998355 @default.
- W2067964852 hasAuthorship W2067964852A5068818684 @default.
- W2067964852 hasConcept C124952713 @default.
- W2067964852 hasConcept C127413603 @default.
- W2067964852 hasConcept C134121241 @default.
- W2067964852 hasConcept C142362112 @default.
- W2067964852 hasConcept C15920480 @default.
- W2067964852 hasConcept C159985019 @default.
- W2067964852 hasConcept C161790260 @default.
- W2067964852 hasConcept C171250308 @default.
- W2067964852 hasConcept C178790620 @default.
- W2067964852 hasConcept C185592680 @default.
- W2067964852 hasConcept C188027245 @default.
- W2067964852 hasConcept C192562407 @default.
- W2067964852 hasConcept C2776371256 @default.
- W2067964852 hasConcept C2779227376 @default.
- W2067964852 hasConcept C2780471494 @default.
- W2067964852 hasConcept C2780583480 @default.
- W2067964852 hasConcept C42360764 @default.
- W2067964852 hasConcept C521977710 @default.
- W2067964852 hasConcept C5304478 @default.
- W2067964852 hasConcept C53524968 @default.
- W2067964852 hasConceptScore W2067964852C124952713 @default.
- W2067964852 hasConceptScore W2067964852C127413603 @default.
- W2067964852 hasConceptScore W2067964852C134121241 @default.
- W2067964852 hasConceptScore W2067964852C142362112 @default.
- W2067964852 hasConceptScore W2067964852C15920480 @default.
- W2067964852 hasConceptScore W2067964852C159985019 @default.
- W2067964852 hasConceptScore W2067964852C161790260 @default.
- W2067964852 hasConceptScore W2067964852C171250308 @default.
- W2067964852 hasConceptScore W2067964852C178790620 @default.
- W2067964852 hasConceptScore W2067964852C185592680 @default.
- W2067964852 hasConceptScore W2067964852C188027245 @default.
- W2067964852 hasConceptScore W2067964852C192562407 @default.
- W2067964852 hasConceptScore W2067964852C2776371256 @default.
- W2067964852 hasConceptScore W2067964852C2779227376 @default.
- W2067964852 hasConceptScore W2067964852C2780471494 @default.
- W2067964852 hasConceptScore W2067964852C2780583480 @default.
- W2067964852 hasConceptScore W2067964852C42360764 @default.
- W2067964852 hasConceptScore W2067964852C521977710 @default.
- W2067964852 hasConceptScore W2067964852C5304478 @default.
- W2067964852 hasConceptScore W2067964852C53524968 @default.
- W2067964852 hasLocation W20679648521 @default.
- W2067964852 hasOpenAccess W2067964852 @default.
- W2067964852 hasPrimaryLocation W20679648521 @default.
- W2067964852 hasRelatedWork W1505829803 @default.
- W2067964852 hasRelatedWork W1963998313 @default.
- W2067964852 hasRelatedWork W1965054172 @default.
- W2067964852 hasRelatedWork W1988517394 @default.
- W2067964852 hasRelatedWork W2068266603 @default.
- W2067964852 hasRelatedWork W2122295523 @default.
- W2067964852 hasRelatedWork W2360345270 @default.
- W2067964852 hasRelatedWork W2388370919 @default.
- W2067964852 hasRelatedWork W2950122242 @default.
- W2067964852 hasRelatedWork W2950368764 @default.
- W2067964852 isParatext "false" @default.
- W2067964852 isRetracted "false" @default.
- W2067964852 magId "2067964852" @default.
- W2067964852 workType "article" @default.