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- W2067967215 endingPage "982" @default.
- W2067967215 startingPage "977" @default.
- W2067967215 abstract "The influence of the physical properties of polymers on their plasma behavior has been investigated under O2 and Ar plasma treatments. The glass transition temperature (Tg) has been found to be an important parameter. A steplike increase in the etch kinetics in O2 plasmas has been correlated to the change in the heat capacity of the polymer occurring above Tg whatever the molecular weight of the polymer. Furthermore, above Tg, changes in the viscoelastic properties induce bulk polymer degradation if chain crosslinking cannot be achieved before or during plasma etching." @default.
- W2067967215 created "2016-06-24" @default.
- W2067967215 creator A5014450384 @default.
- W2067967215 creator A5036548951 @default.
- W2067967215 creator A5050230991 @default.
- W2067967215 creator A5091459000 @default.
- W2067967215 date "1991-07-15" @default.
- W2067967215 modified "2023-09-24" @default.
- W2067967215 title "Polymer behavior under plasma etching: Influence of physical properties on kinetics and durability" @default.
- W2067967215 cites W1598581189 @default.
- W2067967215 cites W1966148306 @default.
- W2067967215 cites W1967259629 @default.
- W2067967215 cites W1978593319 @default.
- W2067967215 cites W1983245683 @default.
- W2067967215 cites W1987563661 @default.
- W2067967215 cites W2002161020 @default.
- W2067967215 cites W2010659317 @default.
- W2067967215 cites W2020091176 @default.
- W2067967215 cites W2031933992 @default.
- W2067967215 cites W2051010915 @default.
- W2067967215 cites W2067489882 @default.
- W2067967215 cites W2072375896 @default.
- W2067967215 cites W2120251688 @default.
- W2067967215 cites W4236325967 @default.
- W2067967215 doi "https://doi.org/10.1063/1.349609" @default.
- W2067967215 hasPublicationYear "1991" @default.
- W2067967215 type Work @default.
- W2067967215 sameAs 2067967215 @default.
- W2067967215 citedByCount "13" @default.
- W2067967215 countsByYear W20679672152012 @default.
- W2067967215 countsByYear W20679672152018 @default.
- W2067967215 countsByYear W20679672152021 @default.
- W2067967215 crossrefType "journal-article" @default.
- W2067967215 hasAuthorship W2067967215A5014450384 @default.
- W2067967215 hasAuthorship W2067967215A5036548951 @default.
- W2067967215 hasAuthorship W2067967215A5050230991 @default.
- W2067967215 hasAuthorship W2067967215A5091459000 @default.
- W2067967215 hasConcept C100460472 @default.
- W2067967215 hasConcept C104304963 @default.
- W2067967215 hasConcept C107187091 @default.
- W2067967215 hasConcept C121332964 @default.
- W2067967215 hasConcept C122865956 @default.
- W2067967215 hasConcept C127413603 @default.
- W2067967215 hasConcept C148898269 @default.
- W2067967215 hasConcept C159985019 @default.
- W2067967215 hasConcept C185592680 @default.
- W2067967215 hasConcept C186541917 @default.
- W2067967215 hasConcept C188027245 @default.
- W2067967215 hasConcept C192562407 @default.
- W2067967215 hasConcept C203220038 @default.
- W2067967215 hasConcept C2779227376 @default.
- W2067967215 hasConcept C2779679103 @default.
- W2067967215 hasConcept C41008148 @default.
- W2067967215 hasConcept C42360764 @default.
- W2067967215 hasConcept C521977710 @default.
- W2067967215 hasConcept C62520636 @default.
- W2067967215 hasConcept C76155785 @default.
- W2067967215 hasConcept C82706917 @default.
- W2067967215 hasConceptScore W2067967215C100460472 @default.
- W2067967215 hasConceptScore W2067967215C104304963 @default.
- W2067967215 hasConceptScore W2067967215C107187091 @default.
- W2067967215 hasConceptScore W2067967215C121332964 @default.
- W2067967215 hasConceptScore W2067967215C122865956 @default.
- W2067967215 hasConceptScore W2067967215C127413603 @default.
- W2067967215 hasConceptScore W2067967215C148898269 @default.
- W2067967215 hasConceptScore W2067967215C159985019 @default.
- W2067967215 hasConceptScore W2067967215C185592680 @default.
- W2067967215 hasConceptScore W2067967215C186541917 @default.
- W2067967215 hasConceptScore W2067967215C188027245 @default.
- W2067967215 hasConceptScore W2067967215C192562407 @default.
- W2067967215 hasConceptScore W2067967215C203220038 @default.
- W2067967215 hasConceptScore W2067967215C2779227376 @default.
- W2067967215 hasConceptScore W2067967215C2779679103 @default.
- W2067967215 hasConceptScore W2067967215C41008148 @default.
- W2067967215 hasConceptScore W2067967215C42360764 @default.
- W2067967215 hasConceptScore W2067967215C521977710 @default.
- W2067967215 hasConceptScore W2067967215C62520636 @default.
- W2067967215 hasConceptScore W2067967215C76155785 @default.
- W2067967215 hasConceptScore W2067967215C82706917 @default.
- W2067967215 hasIssue "2" @default.
- W2067967215 hasLocation W20679672151 @default.
- W2067967215 hasOpenAccess W2067967215 @default.
- W2067967215 hasPrimaryLocation W20679672151 @default.
- W2067967215 hasRelatedWork W109163906 @default.
- W2067967215 hasRelatedWork W140461822 @default.
- W2067967215 hasRelatedWork W1992881076 @default.
- W2067967215 hasRelatedWork W2047367463 @default.
- W2067967215 hasRelatedWork W2048713307 @default.
- W2067967215 hasRelatedWork W2387943847 @default.
- W2067967215 hasRelatedWork W3116223999 @default.
- W2067967215 hasRelatedWork W4211171696 @default.
- W2067967215 hasRelatedWork W4232118530 @default.
- W2067967215 hasRelatedWork W4376622676 @default.
- W2067967215 hasVolume "70" @default.
- W2067967215 isParatext "false" @default.
- W2067967215 isRetracted "false" @default.
- W2067967215 magId "2067967215" @default.
- W2067967215 workType "article" @default.