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- W2068045612 endingPage "461" @default.
- W2068045612 startingPage "457" @default.
- W2068045612 abstract "Hydrogen passivation of polycrystalline silicon wafer is carried out in order to reduce the deleterious effects of grain boundaries. A systematic variation is made in the process parameters implemented during hydrogen passivation and the results of room temperature resistivity measurements are reported. As an efficient tool to study the structure change, positron lifetime spectroscopic measurements are performed on original and hydrogenated polycrystalline silicon wafers and a systematic correlation is sought between the changes that take place in the electrical and structural properties of polycrystalline silicon water, brought about by hydrogen passivation. Um die schädlichen Einflüsse von Korngrenzen zu verringern, wird eine Wasserstoffpassivierung an polykristallinen Siliziumwafern durchgeführt. Die Prozeßparameter werden während der Wasserstoffpassivierung systematisch geändert und die Ergebnisse der Raumtemperaturwiderstandsmessungen mitgeteilt. Als effizientes Mittel zur Untersuchung von Strukturünderungen werden spektroskopische Messungen der Positronenlebensdauer an ursprünglichen und hydrogenierten polykristallinen Siliziumwafern durchgeführt und es wird eine systematische Korrelation zwischen den Ánderungen, die in den elektrischen und strukturellen Eigenschaften von polykristallinen Siliziumwafern infolge der Wasserstoffpassivierung stattfinden, gesucht." @default.
- W2068045612 created "2016-06-24" @default.
- W2068045612 creator A5001120006 @default.
- W2068045612 creator A5061317044 @default.
- W2068045612 creator A5078676366 @default.
- W2068045612 creator A5079479612 @default.
- W2068045612 creator A5090900147 @default.
- W2068045612 date "1989-02-16" @default.
- W2068045612 modified "2023-10-03" @default.
- W2068045612 title "Hydrogen-Induced Structural Changes in Polycrystalline Silicon as Revealed by Positron Lifetime Spectroscopy" @default.
- W2068045612 cites W1978675304 @default.
- W2068045612 cites W1983512038 @default.
- W2068045612 cites W1989620715 @default.
- W2068045612 cites W2006162857 @default.
- W2068045612 cites W2008377535 @default.
- W2068045612 cites W2020976704 @default.
- W2068045612 cites W2049698561 @default.
- W2068045612 cites W2069660266 @default.
- W2068045612 cites W2083119222 @default.
- W2068045612 cites W2133971762 @default.
- W2068045612 cites W2165383671 @default.
- W2068045612 doi "https://doi.org/10.1002/pssa.2211110208" @default.
- W2068045612 hasPublicationYear "1989" @default.
- W2068045612 type Work @default.
- W2068045612 sameAs 2068045612 @default.
- W2068045612 citedByCount "1" @default.
- W2068045612 crossrefType "journal-article" @default.
- W2068045612 hasAuthorship W2068045612A5001120006 @default.
- W2068045612 hasAuthorship W2068045612A5061317044 @default.
- W2068045612 hasAuthorship W2068045612A5078676366 @default.
- W2068045612 hasAuthorship W2068045612A5079479612 @default.
- W2068045612 hasAuthorship W2068045612A5090900147 @default.
- W2068045612 hasConcept C113196181 @default.
- W2068045612 hasConcept C137637335 @default.
- W2068045612 hasConcept C151730666 @default.
- W2068045612 hasConcept C160671074 @default.
- W2068045612 hasConcept C171250308 @default.
- W2068045612 hasConcept C178790620 @default.
- W2068045612 hasConcept C185592680 @default.
- W2068045612 hasConcept C191897082 @default.
- W2068045612 hasConcept C192562407 @default.
- W2068045612 hasConcept C2779227376 @default.
- W2068045612 hasConcept C2779343474 @default.
- W2068045612 hasConcept C2780565262 @default.
- W2068045612 hasConcept C33574316 @default.
- W2068045612 hasConcept C43617362 @default.
- W2068045612 hasConcept C47908070 @default.
- W2068045612 hasConcept C512968161 @default.
- W2068045612 hasConcept C544956773 @default.
- W2068045612 hasConcept C8010536 @default.
- W2068045612 hasConcept C86803240 @default.
- W2068045612 hasConcept C87359718 @default.
- W2068045612 hasConcept C87976508 @default.
- W2068045612 hasConceptScore W2068045612C113196181 @default.
- W2068045612 hasConceptScore W2068045612C137637335 @default.
- W2068045612 hasConceptScore W2068045612C151730666 @default.
- W2068045612 hasConceptScore W2068045612C160671074 @default.
- W2068045612 hasConceptScore W2068045612C171250308 @default.
- W2068045612 hasConceptScore W2068045612C178790620 @default.
- W2068045612 hasConceptScore W2068045612C185592680 @default.
- W2068045612 hasConceptScore W2068045612C191897082 @default.
- W2068045612 hasConceptScore W2068045612C192562407 @default.
- W2068045612 hasConceptScore W2068045612C2779227376 @default.
- W2068045612 hasConceptScore W2068045612C2779343474 @default.
- W2068045612 hasConceptScore W2068045612C2780565262 @default.
- W2068045612 hasConceptScore W2068045612C33574316 @default.
- W2068045612 hasConceptScore W2068045612C43617362 @default.
- W2068045612 hasConceptScore W2068045612C47908070 @default.
- W2068045612 hasConceptScore W2068045612C512968161 @default.
- W2068045612 hasConceptScore W2068045612C544956773 @default.
- W2068045612 hasConceptScore W2068045612C8010536 @default.
- W2068045612 hasConceptScore W2068045612C86803240 @default.
- W2068045612 hasConceptScore W2068045612C87359718 @default.
- W2068045612 hasConceptScore W2068045612C87976508 @default.
- W2068045612 hasIssue "2" @default.
- W2068045612 hasLocation W20680456121 @default.
- W2068045612 hasOpenAccess W2068045612 @default.
- W2068045612 hasPrimaryLocation W20680456121 @default.
- W2068045612 hasRelatedWork W125617560 @default.
- W2068045612 hasRelatedWork W1528259409 @default.
- W2068045612 hasRelatedWork W1622222911 @default.
- W2068045612 hasRelatedWork W1970753049 @default.
- W2068045612 hasRelatedWork W2083119222 @default.
- W2068045612 hasRelatedWork W2803463400 @default.
- W2068045612 hasRelatedWork W2803877136 @default.
- W2068045612 hasRelatedWork W3023869297 @default.
- W2068045612 hasRelatedWork W3081348527 @default.
- W2068045612 hasRelatedWork W3135425688 @default.
- W2068045612 hasVolume "111" @default.
- W2068045612 isParatext "false" @default.
- W2068045612 isRetracted "false" @default.
- W2068045612 magId "2068045612" @default.
- W2068045612 workType "article" @default.