Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068103786> ?p ?o ?g. }
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- W2068103786 endingPage "6549" @default.
- W2068103786 startingPage "6549" @default.
- W2068103786 abstract "This paper forcuses on the effect of back-etching on the residual stress in lead titanate (PT) thin film. The PT thin films were deposited by a chemical solution deposition (CSD) on a Pt/Ti/SiO 2 /Si substrate with different back-etching depth. The part of the Si substrates of 500 µm thickness was etched from back side (back-etching) with a wet etching process. The depth of the back-etching was controlled by changing the etching time in the range from 481.5 µm to 250 µm (residual Si; 18.5–250 µm). The residual stress in PT thin film was calculated from the phonon mode shift of raman scattering. In addition, the intrinsic dielectric constant for PT thin film was also calculated from the lattice mode frequencies. As a result, the residual stress in PT thin films abruptly increased with increasing depth of back-etching at around 300 µm (residual Si; 200 µm) and reached about 1.7 GPa." @default.
- W2068103786 created "2016-06-24" @default.
- W2068103786 creator A5023319882 @default.
- W2068103786 creator A5060980991 @default.
- W2068103786 creator A5061563484 @default.
- W2068103786 creator A5075956345 @default.
- W2068103786 creator A5088405554 @default.
- W2068103786 date "2004-09-01" @default.
- W2068103786 modified "2023-09-24" @default.
- W2068103786 title "Effect of Back-Etching on Residual Stress in Lead Titanate Thin Films on Si Wafer" @default.
- W2068103786 cites W2008931450 @default.
- W2068103786 cites W2011506339 @default.
- W2068103786 cites W2014728276 @default.
- W2068103786 cites W2030560134 @default.
- W2068103786 cites W2031189745 @default.
- W2068103786 cites W2031581993 @default.
- W2068103786 cites W2035154896 @default.
- W2068103786 cites W2044237396 @default.
- W2068103786 cites W2046535337 @default.
- W2068103786 cites W2051037750 @default.
- W2068103786 cites W2051310735 @default.
- W2068103786 cites W2071238700 @default.
- W2068103786 cites W2088039464 @default.
- W2068103786 doi "https://doi.org/10.1143/jjap.43.6549" @default.
- W2068103786 hasPublicationYear "2004" @default.
- W2068103786 type Work @default.
- W2068103786 sameAs 2068103786 @default.
- W2068103786 citedByCount "10" @default.
- W2068103786 countsByYear W20681037862012 @default.
- W2068103786 countsByYear W20681037862022 @default.
- W2068103786 crossrefType "journal-article" @default.
- W2068103786 hasAuthorship W2068103786A5023319882 @default.
- W2068103786 hasAuthorship W2068103786A5060980991 @default.
- W2068103786 hasAuthorship W2068103786A5061563484 @default.
- W2068103786 hasAuthorship W2068103786A5075956345 @default.
- W2068103786 hasAuthorship W2068103786A5088405554 @default.
- W2068103786 hasConcept C100460472 @default.
- W2068103786 hasConcept C120665830 @default.
- W2068103786 hasConcept C121332964 @default.
- W2068103786 hasConcept C1291036 @default.
- W2068103786 hasConcept C130472188 @default.
- W2068103786 hasConcept C133386390 @default.
- W2068103786 hasConcept C159985019 @default.
- W2068103786 hasConcept C160671074 @default.
- W2068103786 hasConcept C171250308 @default.
- W2068103786 hasConcept C185592680 @default.
- W2068103786 hasConcept C19067145 @default.
- W2068103786 hasConcept C192562407 @default.
- W2068103786 hasConcept C199289684 @default.
- W2068103786 hasConcept C2779000267 @default.
- W2068103786 hasConcept C2779227376 @default.
- W2068103786 hasConcept C37292000 @default.
- W2068103786 hasConcept C40003534 @default.
- W2068103786 hasConcept C49040817 @default.
- W2068103786 hasConcept C79090758 @default.
- W2068103786 hasConceptScore W2068103786C100460472 @default.
- W2068103786 hasConceptScore W2068103786C120665830 @default.
- W2068103786 hasConceptScore W2068103786C121332964 @default.
- W2068103786 hasConceptScore W2068103786C1291036 @default.
- W2068103786 hasConceptScore W2068103786C130472188 @default.
- W2068103786 hasConceptScore W2068103786C133386390 @default.
- W2068103786 hasConceptScore W2068103786C159985019 @default.
- W2068103786 hasConceptScore W2068103786C160671074 @default.
- W2068103786 hasConceptScore W2068103786C171250308 @default.
- W2068103786 hasConceptScore W2068103786C185592680 @default.
- W2068103786 hasConceptScore W2068103786C19067145 @default.
- W2068103786 hasConceptScore W2068103786C192562407 @default.
- W2068103786 hasConceptScore W2068103786C199289684 @default.
- W2068103786 hasConceptScore W2068103786C2779000267 @default.
- W2068103786 hasConceptScore W2068103786C2779227376 @default.
- W2068103786 hasConceptScore W2068103786C37292000 @default.
- W2068103786 hasConceptScore W2068103786C40003534 @default.
- W2068103786 hasConceptScore W2068103786C49040817 @default.
- W2068103786 hasConceptScore W2068103786C79090758 @default.
- W2068103786 hasIssue "9S" @default.
- W2068103786 hasLocation W20681037861 @default.
- W2068103786 hasOpenAccess W2068103786 @default.
- W2068103786 hasPrimaryLocation W20681037861 @default.
- W2068103786 hasRelatedWork W116756786 @default.
- W2068103786 hasRelatedWork W2052794911 @default.
- W2068103786 hasRelatedWork W2082133582 @default.
- W2068103786 hasRelatedWork W2138076480 @default.
- W2068103786 hasRelatedWork W2139971148 @default.
- W2068103786 hasRelatedWork W2196738352 @default.
- W2068103786 hasRelatedWork W2270301116 @default.
- W2068103786 hasRelatedWork W2381609367 @default.
- W2068103786 hasRelatedWork W2551637397 @default.
- W2068103786 hasRelatedWork W3099457188 @default.
- W2068103786 hasVolume "43" @default.
- W2068103786 isParatext "false" @default.
- W2068103786 isRetracted "false" @default.
- W2068103786 magId "2068103786" @default.
- W2068103786 workType "article" @default.