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- W2068127536 abstract "An optical diffraction method is described for inspecting periodic structures such as combs or semiconductor leads. Coherent light passing between the prongs of the structure self interfere at the fractional Talbot plane to provide a simple method of inspection. Computer simulation and laboratory experiments show the viability of this approach. The theory assumes infinite structures. In practice, large and effect signals arise due to the finiteness of the periodic structure. A neural network is demonstrated that learns to distinguish and effect signals from prong damage signals. The variability of the measuring process in a production environment makes neural networks an appropriate approach for this task." @default.
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- W2068127536 date "1997-07-28" @default.
- W2068127536 modified "2023-09-23" @default.
- W2068127536 title "Neural network inspection of periodic structures from optical diffraction" @default.
- W2068127536 doi "https://doi.org/10.1117/12.280817" @default.
- W2068127536 hasPublicationYear "1997" @default.
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