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• W2068192214 endingPage "851" @default.
• W2068192214 startingPage "843" @default.
• W2068192214 abstract "The effect of Cr addition to the gate of a Pd/AlN/Si Hydrogen gas sensor was investigated by modifying the gate composition and structure. A device with a pure Pd gate responds to hydrogen concentrations as low as 1 ppm, with saturation at about 60 ppm. However, with a Pd0.96Cr0.04 alloy gated device, although the response amplitude was reduced, the dynamic range was considerably enhanced, with useful response up to 50,000 ppm and with quite satisfactory signal to noise down to 50 ppm. Interestingly, in 10% Cr alloyed to the gate, the response was lost. To investigate the mechanism responsible for this effect, two gate structures were studied where a thin layer of pure Pd was added to the 4% alloy gate, one at its outer surface and the other at the gate/AlN interface. The response of the former saturated at 60 ppm and in general behaved comparably to the device with a pure Pd gate, whereas the latter showed the expanded dynamic range. For all these cases the maximum magnitude of the electrical response is in the range of 0.1–0.5 V, even though the hydrogen concentration range varies by three orders of magnitude. This indicates that saturating electrical response is highly sensitive to the properties of the gate outer surface, whereas hydrogen sensitivity is highly dependent on the amount of hydrogen reaching the interface between metal gate and insulator." @default.
• W2068192214 created "2016-06-24" @default.
• W2068192214 creator A5004284507 @default.
• W2068192214 creator A5023302732 @default.
• W2068192214 creator A5043676563 @default.
• W2068192214 creator A5053785720 @default.
• W2068192214 creator A5057285956 @default.
• W2068192214 creator A5066862953 @default.
• W2068192214 creator A5068501477 @default.
• W2068192214 creator A5080553284 @default.
• W2068192214 creator A5082437780 @default.
• W2068192214 creator A5090591299 @default.
• W2068192214 date "2006-02-01" @default.
• W2068192214 modified "2023-10-17" @default.
• W2068192214 title "Response to hydrogen of a metal/AlN/Si thin film structure: Effects of composition and structure of a combination Pd–Cr gate" @default.
• W2068192214 cites W1965739067 @default.
• W2068192214 cites W1967449055 @default.
• W2068192214 cites W1984460700 @default.
• W2068192214 cites W1987375307 @default.
• W2068192214 cites W1989306994 @default.
• W2068192214 cites W1995634138 @default.
• W2068192214 cites W2022753109 @default.
• W2068192214 cites W2028990350 @default.
• W2068192214 cites W2053165257 @default.
• W2068192214 cites W2057969717 @default.
• W2068192214 cites W2079965674 @default.
• W2068192214 cites W2326706234 @default.
• W2068192214 doi "https://doi.org/10.1016/j.snb.2005.03.115" @default.
• W2068192214 hasPublicationYear "2006" @default.
• W2068192214 type Work @default.
• W2068192214 sameAs 2068192214 @default.
• W2068192214 citedByCount "14" @default.
• W2068192214 countsByYear W20681922142012 @default.
• W2068192214 countsByYear W20681922142017 @default.
• W2068192214 countsByYear W20681922142018 @default.
• W2068192214 countsByYear W20681922142019 @default.
• W2068192214 countsByYear W20681922142020 @default.
• W2068192214 countsByYear W20681922142021 @default.
• W2068192214 crossrefType "journal-article" @default.
• W2068192214 hasAuthorship W2068192214A5004284507 @default.
• W2068192214 hasAuthorship W2068192214A5023302732 @default.
• W2068192214 hasAuthorship W2068192214A5043676563 @default.
• W2068192214 hasAuthorship W2068192214A5053785720 @default.
• W2068192214 hasAuthorship W2068192214A5057285956 @default.
• W2068192214 hasAuthorship W2068192214A5066862953 @default.
• W2068192214 hasAuthorship W2068192214A5068501477 @default.
• W2068192214 hasAuthorship W2068192214A5080553284 @default.
• W2068192214 hasAuthorship W2068192214A5082437780 @default.
• W2068192214 hasAuthorship W2068192214A5090591299 @default.
• W2068192214 hasConcept C113196181 @default.
• W2068192214 hasConcept C114614502 @default.
• W2068192214 hasConcept C119599485 @default.
• W2068192214 hasConcept C127413603 @default.
• W2068192214 hasConcept C159985019 @default.
• W2068192214 hasConcept C165801399 @default.
• W2068192214 hasConcept C172385210 @default.
• W2068192214 hasConcept C178790620 @default.
• W2068192214 hasConcept C185592680 @default.
• W2068192214 hasConcept C191897082 @default.
• W2068192214 hasConcept C192562407 @default.
• W2068192214 hasConcept C2361726 @default.
• W2068192214 hasConcept C2780026712 @default.
• W2068192214 hasConcept C33923547 @default.
• W2068192214 hasConcept C43617362 @default.
• W2068192214 hasConcept C49040817 @default.
• W2068192214 hasConcept C51140833 @default.
• W2068192214 hasConcept C512968161 @default.
• W2068192214 hasConcept C544153396 @default.
• W2068192214 hasConcept C9930424 @default.
• W2068192214 hasConceptScore W2068192214C113196181 @default.
• W2068192214 hasConceptScore W2068192214C114614502 @default.
• W2068192214 hasConceptScore W2068192214C119599485 @default.
• W2068192214 hasConceptScore W2068192214C127413603 @default.
• W2068192214 hasConceptScore W2068192214C159985019 @default.
• W2068192214 hasConceptScore W2068192214C165801399 @default.
• W2068192214 hasConceptScore W2068192214C172385210 @default.
• W2068192214 hasConceptScore W2068192214C178790620 @default.
• W2068192214 hasConceptScore W2068192214C185592680 @default.
• W2068192214 hasConceptScore W2068192214C191897082 @default.
• W2068192214 hasConceptScore W2068192214C192562407 @default.
• W2068192214 hasConceptScore W2068192214C2361726 @default.
• W2068192214 hasConceptScore W2068192214C2780026712 @default.
• W2068192214 hasConceptScore W2068192214C33923547 @default.
• W2068192214 hasConceptScore W2068192214C43617362 @default.
• W2068192214 hasConceptScore W2068192214C49040817 @default.
• W2068192214 hasConceptScore W2068192214C51140833 @default.
• W2068192214 hasConceptScore W2068192214C512968161 @default.
• W2068192214 hasConceptScore W2068192214C544153396 @default.
• W2068192214 hasConceptScore W2068192214C9930424 @default.
• W2068192214 hasIssue "2" @default.
• W2068192214 hasLocation W20681922141 @default.
• W2068192214 hasOpenAccess W2068192214 @default.
• W2068192214 hasPrimaryLocation W20681922141 @default.
• W2068192214 hasRelatedWork W1547837157 @default.
• W2068192214 hasRelatedWork W1563540659 @default.
• W2068192214 hasRelatedWork W2023578107 @default.
• W2068192214 hasRelatedWork W2074059639 @default.
• W2068192214 hasRelatedWork W2104116876 @default.

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