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- W2068207265 abstract "We have studied the technologies for the fabrication of a diamond/SiC double layer for use as an x‐ray mask membrane. Each film layer (diamond and SiC) has excellent quality, i.e., crystallinity and purity, and is a precisely stress‐controlled freestanding membrane of the diamond/SiC double layer. We have fabricated the diamond/SiC double layer membrane and have also evaluated important properties required for the use of the membrane as an x‐ray mask in detail. Surface roughness of the diamond layer was made to be 7 nm rms using the chemical‐mechanical polishing technique. Due to the smoothing, the amount of incident light scattered at the diamond surface was decreased, and the visible light (λ = 633 nm) transmittance of the diamond/SiC double layer membrane (film thicknesses: diamond/SiC = 1.1 μm/0.3 μm) attained a maximum value of 64%. It was confirmed by transmission electron microscopy observation that the diamond/SiC boundary layer had a coexistence region, so the double layer had strong adhesion. Furthermore, we evaluated the biaxial Young's modulus using the bulge method, which was 1070 GPa for the diamond/SiC double layer." @default.
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- W2068207265 date "1997-09-01" @default.
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- W2068207265 title "Fabrication and Evaluation of Diamond/SiC Double Layer Membrane for X‐Ray Mask" @default.
- W2068207265 doi "https://doi.org/10.1149/1.1838002" @default.
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