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• W2068287174 abstract "Fraunhofer IPMS has developed a one-dimensional high-speed spatial light modulator in cooperation with Micronic Mydata AB. This SLM is the core element of the Swedish company’s new LDI 5sp series of Laser-Direct-Imaging systems optimized for processing of advanced substrates for semiconductor packaging. This paper reports on design, technology, characterization and application results of the new SLM. With a resolution of 8192 pixels that can be modulated in the MHz range and the capability to generate intensity gray-levels instantly without time multiplexing, the SLM is applicable also in many other fields, wherever modulation of ultraviolet light needs to be combined with high throughput and high precision." @default.
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• W2068287174 date "2014-03-07" @default.
• W2068287174 modified "2023-10-14" @default.
• W2068287174 title "High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications" @default.
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• W2068287174 doi "https://doi.org/10.1117/12.2036533" @default.
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