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- W2068302171 abstract "Abstract The influence of a number of parameters on the strain sensitivity of thin germanium films deposited in vacuo was investigated by means of a factorial plan of experiments. Statistically significant effects of the deposition and annealing temperatures were observed, as well as of the interactions between the deposition rate and the other factors. The highest strain sensitivity was found with films having large grain size and high crystalline perfection." @default.
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- W2068302171 title "Influence of deposition parameters on the strain sensitivity of thin germanium films" @default.
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- W2068302171 doi "https://doi.org/10.1016/0040-6090(72)90397-5" @default.
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