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- W2068386000 abstract "In this research, a novel high-precision pitch artifact using balls is proposed for calibration of pitch measuring instruments. This pitch artifact is composed of the combination and the alignment of balls and cylinders on a plane. Balls, cylinders and planes are possible to be manufactured with several-ten-nanometer-order accuracy. Therefore, this artifact can accomplish high dimensional accuracy. In addition, manufacturing of this artifact is not difficult because time-consuming special process is not needed. In this report, the concept, structure and feature of this pitch artifact are proposed and theoretical analysis is carried out." @default.
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- W2068386000 date "2008-06-01" @default.
- W2068386000 modified "2023-09-23" @default.
- W2068386000 title "Novel High-Precision Pitch Artifact Using Balls" @default.
- W2068386000 doi "https://doi.org/10.4028/www.scientific.net/kem.381-382.95" @default.
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