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- W2068429605 abstract "An overview of the present silicon-on-insulator (SOI) waveguide technology is given and supplemented with an extensive set of theory and simulation results. Characteristics of slab-, rectangular- and ridge waveguides in SOI are explained. In particular, the number of modes and the single-mode conditions are carefully analyzed. Experimental work with straight and bent 8 to 10 μm thick SOI ridge waveguides and a very fast thermo-optical switch are reported. Propagation loss in a very long spiral waveguide down to 0.3 dB/cm, waveguide birefringence below 10<sup>-4</sup>, and a switching frequency up to 167 kHz were obtained. A very promising multi-step patterning principle for SOI waveguides is described together with many practical application examples." @default.
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- W2068429605 date "2004-05-28" @default.
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- W2068429605 title "Development of silicon-on-insulator waveguide technology" @default.
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- W2068429605 doi "https://doi.org/10.1117/12.537540" @default.
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