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- W2068441978 endingPage "4122" @default.
- W2068441978 startingPage "4122" @default.
- W2068441978 abstract "Pb(Zr x , Ti 1- x )O 3 (PZT) thin films were deposited on Pt/SiO 2 /Si substrates by rf-magnetron sputtering using an alloy target consisting of Zr-Ti alloy and a Pb metal. When an alloy target was used in reactive sputtering, no change was observed in the Zr/Ti ratio of the films for up to 300 h for target uses. The (111)-oriented PZT films were successfully grown at substrate temperatures of 605-620°C. The coercive fields ( E c ) and remanent polarizations ( P r ) of the films with only the perovskite phase were in the range of 70-72 kV/cm and 20-22 µC/cm 2 , respectively. In fatigue behavior, switched charge density started to drop at 10 8 cycles." @default.
- W2068441978 created "2016-06-24" @default.
- W2068441978 creator A5025294932 @default.
- W2068441978 creator A5052206175 @default.
- W2068441978 creator A5077894974 @default.
- W2068441978 date "1993-09-01" @default.
- W2068441978 modified "2023-10-16" @default.
- W2068441978 title "Preparation and Characterization of Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub> Thin Films by Reactive Sputtering Using an Alloy Target" @default.
- W2068441978 cites W1993021783 @default.
- W2068441978 cites W2014815949 @default.
- W2068441978 cites W2059707997 @default.
- W2068441978 cites W2064728641 @default.
- W2068441978 cites W2065954153 @default.
- W2068441978 cites W2068264209 @default.
- W2068441978 doi "https://doi.org/10.1143/jjap.32.4122" @default.
- W2068441978 hasPublicationYear "1993" @default.
- W2068441978 type Work @default.
- W2068441978 sameAs 2068441978 @default.
- W2068441978 citedByCount "12" @default.
- W2068441978 countsByYear W20684419782021 @default.
- W2068441978 crossrefType "journal-article" @default.
- W2068441978 hasAuthorship W2068441978A5025294932 @default.
- W2068441978 hasAuthorship W2068441978A5052206175 @default.
- W2068441978 hasAuthorship W2068441978A5077894974 @default.
- W2068441978 hasConcept C111368507 @default.
- W2068441978 hasConcept C113196181 @default.
- W2068441978 hasConcept C121332964 @default.
- W2068441978 hasConcept C126530901 @default.
- W2068441978 hasConcept C127313418 @default.
- W2068441978 hasConcept C171250308 @default.
- W2068441978 hasConcept C185592680 @default.
- W2068441978 hasConcept C19067145 @default.
- W2068441978 hasConcept C191897082 @default.
- W2068441978 hasConcept C192562407 @default.
- W2068441978 hasConcept C22423302 @default.
- W2068441978 hasConcept C26873012 @default.
- W2068441978 hasConcept C2777289219 @default.
- W2068441978 hasConcept C2780026712 @default.
- W2068441978 hasConcept C43617362 @default.
- W2068441978 hasConcept C61427134 @default.
- W2068441978 hasConceptScore W2068441978C111368507 @default.
- W2068441978 hasConceptScore W2068441978C113196181 @default.
- W2068441978 hasConceptScore W2068441978C121332964 @default.
- W2068441978 hasConceptScore W2068441978C126530901 @default.
- W2068441978 hasConceptScore W2068441978C127313418 @default.
- W2068441978 hasConceptScore W2068441978C171250308 @default.
- W2068441978 hasConceptScore W2068441978C185592680 @default.
- W2068441978 hasConceptScore W2068441978C19067145 @default.
- W2068441978 hasConceptScore W2068441978C191897082 @default.
- W2068441978 hasConceptScore W2068441978C192562407 @default.
- W2068441978 hasConceptScore W2068441978C22423302 @default.
- W2068441978 hasConceptScore W2068441978C26873012 @default.
- W2068441978 hasConceptScore W2068441978C2777289219 @default.
- W2068441978 hasConceptScore W2068441978C2780026712 @default.
- W2068441978 hasConceptScore W2068441978C43617362 @default.
- W2068441978 hasConceptScore W2068441978C61427134 @default.
- W2068441978 hasIssue "9S" @default.
- W2068441978 hasLocation W20684419781 @default.
- W2068441978 hasOpenAccess W2068441978 @default.
- W2068441978 hasPrimaryLocation W20684419781 @default.
- W2068441978 hasRelatedWork W1995810423 @default.
- W2068441978 hasRelatedWork W2005415654 @default.
- W2068441978 hasRelatedWork W2073638793 @default.
- W2068441978 hasRelatedWork W2316948141 @default.
- W2068441978 hasRelatedWork W2348598805 @default.
- W2068441978 hasRelatedWork W2373012329 @default.
- W2068441978 hasRelatedWork W2373579184 @default.
- W2068441978 hasRelatedWork W2392638099 @default.
- W2068441978 hasRelatedWork W2526521535 @default.
- W2068441978 hasRelatedWork W2188856160 @default.
- W2068441978 hasVolume "32" @default.
- W2068441978 isParatext "false" @default.
- W2068441978 isRetracted "false" @default.
- W2068441978 magId "2068441978" @default.
- W2068441978 workType "article" @default.