Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068470554> ?p ?o ?g. }
- W2068470554 endingPage "58" @default.
- W2068470554 startingPage "1" @default.
- W2068470554 abstract "During the past century, there have been hundreds of manuscripts published reporting different aspects of sputtering. The purpose of this article is to summarize the trends observed when elemental and multicomponent materials are exposed to energetic ion beams. Attention is focused on low-energy (<10 keV) physical sputtering effects. The changes in the sputtering yield as a function of both the background gas composition and the incident ion mass, energy, angle, and dose are summarized. Emphasis is placed on the changes in surface microstructure and topography resulting from sputtering. The advantages and limitations of different experimental approaches used for sputtering yield measurements are addressed." @default.
- W2068470554 created "2016-06-24" @default.
- W2068470554 creator A5032435203 @default.
- W2068470554 date "2000-05-01" @default.
- W2068470554 modified "2023-09-27" @default.
- W2068470554 title "Trends in sputtering" @default.
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