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- W2068480663 abstract "Ultrasensitive accelerometers are needed by NASA for the measurement of orbital drag. We have designed an accelerometer capable of measuring 10<SUP>-8</SUP>. In this paper, a method for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip is presented. To meet sensitivity sepcifications, a weak spring and large mass are needed. However, these represent a delicate mechanism and a method of protection is provided by electrostatically clamping the proof mass in a fixed position. The effectiveness of the electrostatic clamp has been measured. It is found that clamping against an acceleration of 200 g is possible with voltages as low as 30 volts." @default.
- W2068480663 created "2016-06-24" @default.
- W2068480663 creator A5017854513 @default.
- W2068480663 creator A5042010181 @default.
- W2068480663 creator A5049959303 @default.
- W2068480663 creator A5076916160 @default.
- W2068480663 date "1995-09-19" @default.
- W2068480663 modified "2023-10-01" @default.
- W2068480663 title "<title>Tunneling tip protection for a bulk micromachined accelerometer</title>" @default.
- W2068480663 doi "https://doi.org/10.1117/12.221289" @default.
- W2068480663 hasPublicationYear "1995" @default.
- W2068480663 type Work @default.
- W2068480663 sameAs 2068480663 @default.
- W2068480663 citedByCount "2" @default.
- W2068480663 crossrefType "proceedings-article" @default.
- W2068480663 hasAuthorship W2068480663A5017854513 @default.
- W2068480663 hasAuthorship W2068480663A5042010181 @default.
- W2068480663 hasAuthorship W2068480663A5049959303 @default.
- W2068480663 hasAuthorship W2068480663A5076916160 @default.
- W2068480663 hasConcept C111919701 @default.
- W2068480663 hasConcept C117896860 @default.
- W2068480663 hasConcept C119599485 @default.
- W2068480663 hasConcept C120398109 @default.
- W2068480663 hasConcept C121332964 @default.
- W2068480663 hasConcept C127413603 @default.
- W2068480663 hasConcept C136525101 @default.
- W2068480663 hasConcept C142724271 @default.
- W2068480663 hasConcept C145667562 @default.
- W2068480663 hasConcept C165801399 @default.
- W2068480663 hasConcept C192562407 @default.
- W2068480663 hasConcept C204787440 @default.
- W2068480663 hasConcept C21200559 @default.
- W2068480663 hasConcept C24326235 @default.
- W2068480663 hasConcept C24890656 @default.
- W2068480663 hasConcept C2780330379 @default.
- W2068480663 hasConcept C31972630 @default.
- W2068480663 hasConcept C41008148 @default.
- W2068480663 hasConcept C49040817 @default.
- W2068480663 hasConcept C57879066 @default.
- W2068480663 hasConcept C71924100 @default.
- W2068480663 hasConcept C72921944 @default.
- W2068480663 hasConcept C74650414 @default.
- W2068480663 hasConcept C84111939 @default.
- W2068480663 hasConcept C89805583 @default.
- W2068480663 hasConceptScore W2068480663C111919701 @default.
- W2068480663 hasConceptScore W2068480663C117896860 @default.
- W2068480663 hasConceptScore W2068480663C119599485 @default.
- W2068480663 hasConceptScore W2068480663C120398109 @default.
- W2068480663 hasConceptScore W2068480663C121332964 @default.
- W2068480663 hasConceptScore W2068480663C127413603 @default.
- W2068480663 hasConceptScore W2068480663C136525101 @default.
- W2068480663 hasConceptScore W2068480663C142724271 @default.
- W2068480663 hasConceptScore W2068480663C145667562 @default.
- W2068480663 hasConceptScore W2068480663C165801399 @default.
- W2068480663 hasConceptScore W2068480663C192562407 @default.
- W2068480663 hasConceptScore W2068480663C204787440 @default.
- W2068480663 hasConceptScore W2068480663C21200559 @default.
- W2068480663 hasConceptScore W2068480663C24326235 @default.
- W2068480663 hasConceptScore W2068480663C24890656 @default.
- W2068480663 hasConceptScore W2068480663C2780330379 @default.
- W2068480663 hasConceptScore W2068480663C31972630 @default.
- W2068480663 hasConceptScore W2068480663C41008148 @default.
- W2068480663 hasConceptScore W2068480663C49040817 @default.
- W2068480663 hasConceptScore W2068480663C57879066 @default.
- W2068480663 hasConceptScore W2068480663C71924100 @default.
- W2068480663 hasConceptScore W2068480663C72921944 @default.
- W2068480663 hasConceptScore W2068480663C74650414 @default.
- W2068480663 hasConceptScore W2068480663C84111939 @default.
- W2068480663 hasConceptScore W2068480663C89805583 @default.
- W2068480663 hasLocation W20684806631 @default.
- W2068480663 hasOpenAccess W2068480663 @default.
- W2068480663 hasPrimaryLocation W20684806631 @default.
- W2068480663 hasRelatedWork W1501844198 @default.
- W2068480663 hasRelatedWork W1843981434 @default.
- W2068480663 hasRelatedWork W1981205801 @default.
- W2068480663 hasRelatedWork W2056783651 @default.
- W2068480663 hasRelatedWork W2130018586 @default.
- W2068480663 hasRelatedWork W2145387305 @default.
- W2068480663 hasRelatedWork W2147065145 @default.
- W2068480663 hasRelatedWork W2158455771 @default.
- W2068480663 hasRelatedWork W2357393232 @default.
- W2068480663 hasRelatedWork W2739119237 @default.
- W2068480663 isParatext "false" @default.
- W2068480663 isRetracted "false" @default.
- W2068480663 magId "2068480663" @default.
- W2068480663 workType "article" @default.