Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068482178> ?p ?o ?g. }
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92
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- W2068482178 endingPage "138" @default.
- W2068482178 startingPage "133" @default.
- W2068482178 abstract "A wet microwave enhanced selective anisotropic fast etching of single-crystal silicon has been developed. Deep square cavities with flat thin silicon membranes of very good quality were etched in standard (100) n-type substrate. Si3N4 CVD layer served as the mask. For microwaves 2.54 GHz and 100 W of microwave power, etching velocity of (100) plane was increased almost 30 times in comparison to the standard process. The total time of etching process of thin membranes in standard Si substrate was reduced from hours to minutes. Anisotropic etching of Si in deionized water was obtained." @default.
- W2068482178 created "2016-06-24" @default.
- W2068482178 creator A5065918986 @default.
- W2068482178 date "2000-08-01" @default.
- W2068482178 modified "2023-10-09" @default.
- W2068482178 title "Microwave enhanced fast anisotropic etching of monocrystalline silicon" @default.
- W2068482178 cites W1568890842 @default.
- W2068482178 cites W1573969440 @default.
- W2068482178 cites W1670172520 @default.
- W2068482178 cites W1971673580 @default.
- W2068482178 cites W2008260439 @default.
- W2068482178 cites W2028987083 @default.
- W2068482178 cites W2032694544 @default.
- W2068482178 cites W2118654775 @default.
- W2068482178 cites W2137178805 @default.
- W2068482178 doi "https://doi.org/10.1016/s0924-4247(00)00373-3" @default.
- W2068482178 hasPublicationYear "2000" @default.
- W2068482178 type Work @default.
- W2068482178 sameAs 2068482178 @default.
- W2068482178 citedByCount "26" @default.
- W2068482178 countsByYear W20684821782012 @default.
- W2068482178 countsByYear W20684821782013 @default.
- W2068482178 countsByYear W20684821782014 @default.
- W2068482178 countsByYear W20684821782017 @default.
- W2068482178 countsByYear W20684821782019 @default.
- W2068482178 countsByYear W20684821782020 @default.
- W2068482178 countsByYear W20684821782021 @default.
- W2068482178 countsByYear W20684821782022 @default.
- W2068482178 countsByYear W20684821782023 @default.
- W2068482178 crossrefType "journal-article" @default.
- W2068482178 hasAuthorship W2068482178A5065918986 @default.
- W2068482178 hasConcept C100460472 @default.
- W2068482178 hasConcept C111368507 @default.
- W2068482178 hasConcept C120665830 @default.
- W2068482178 hasConcept C121332964 @default.
- W2068482178 hasConcept C127313418 @default.
- W2068482178 hasConcept C1291036 @default.
- W2068482178 hasConcept C130472188 @default.
- W2068482178 hasConcept C159985019 @default.
- W2068482178 hasConcept C192562407 @default.
- W2068482178 hasConcept C199360897 @default.
- W2068482178 hasConcept C26953177 @default.
- W2068482178 hasConcept C2777289219 @default.
- W2068482178 hasConcept C2779227376 @default.
- W2068482178 hasConcept C2781285689 @default.
- W2068482178 hasConcept C41008148 @default.
- W2068482178 hasConcept C44838205 @default.
- W2068482178 hasConcept C49040817 @default.
- W2068482178 hasConcept C544956773 @default.
- W2068482178 hasConcept C62520636 @default.
- W2068482178 hasConcept C85725439 @default.
- W2068482178 hasConceptScore W2068482178C100460472 @default.
- W2068482178 hasConceptScore W2068482178C111368507 @default.
- W2068482178 hasConceptScore W2068482178C120665830 @default.
- W2068482178 hasConceptScore W2068482178C121332964 @default.
- W2068482178 hasConceptScore W2068482178C127313418 @default.
- W2068482178 hasConceptScore W2068482178C1291036 @default.
- W2068482178 hasConceptScore W2068482178C130472188 @default.
- W2068482178 hasConceptScore W2068482178C159985019 @default.
- W2068482178 hasConceptScore W2068482178C192562407 @default.
- W2068482178 hasConceptScore W2068482178C199360897 @default.
- W2068482178 hasConceptScore W2068482178C26953177 @default.
- W2068482178 hasConceptScore W2068482178C2777289219 @default.
- W2068482178 hasConceptScore W2068482178C2779227376 @default.
- W2068482178 hasConceptScore W2068482178C2781285689 @default.
- W2068482178 hasConceptScore W2068482178C41008148 @default.
- W2068482178 hasConceptScore W2068482178C44838205 @default.
- W2068482178 hasConceptScore W2068482178C49040817 @default.
- W2068482178 hasConceptScore W2068482178C544956773 @default.
- W2068482178 hasConceptScore W2068482178C62520636 @default.
- W2068482178 hasConceptScore W2068482178C85725439 @default.
- W2068482178 hasIssue "1-3" @default.
- W2068482178 hasLocation W20684821781 @default.
- W2068482178 hasOpenAccess W2068482178 @default.
- W2068482178 hasPrimaryLocation W20684821781 @default.
- W2068482178 hasRelatedWork W19452786 @default.
- W2068482178 hasRelatedWork W1981251050 @default.
- W2068482178 hasRelatedWork W1991288435 @default.
- W2068482178 hasRelatedWork W2032736037 @default.
- W2068482178 hasRelatedWork W2044427337 @default.
- W2068482178 hasRelatedWork W2082133582 @default.
- W2068482178 hasRelatedWork W2100954478 @default.
- W2068482178 hasRelatedWork W2389091192 @default.
- W2068482178 hasRelatedWork W2094633807 @default.
- W2068482178 hasRelatedWork W2495723748 @default.
- W2068482178 hasVolume "85" @default.
- W2068482178 isParatext "false" @default.
- W2068482178 isRetracted "false" @default.
- W2068482178 magId "2068482178" @default.
- W2068482178 workType "article" @default.