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• W2068484181 abstract "We propose a new method for focus tracking during the recording of a sequence of digital holograms while the sample experiences axial displacement. Corrected reconstruction distances can be automatically calculated, and well-focused amplitude and phase-contrast images can be obtained for each digitized hologram. The method is demonstrated for inspection of microelectromechanical systems subjected to thermal load. The method can be applied as a quasi-real-time procedure." @default.
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• W2068484181 date "2003-07-15" @default.
• W2068484181 modified "2023-09-25" @default.
• W2068484181 title "Digital holographic microscope with automatic focus tracking by detecting sample displacement in real time" @default.
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• W2068484181 doi "https://doi.org/10.1364/ol.28.001257" @default.
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