Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068503622> ?p ?o ?g. }
- W2068503622 endingPage "5269" @default.
- W2068503622 startingPage "5264" @default.
- W2068503622 abstract "Amorphous and partially crystalline WO3 thin films were prepared by reactive dual magnetron sputtering and successively implanted by erbium ions with a fluence in the range from 7.7 × 1014 to 5 × 1015 ions/cm2. The electrical and optical properties were studied as a function of the film deposition parameters and the ion fluence. Ion implantation caused a strong decrease of the resistivity, a moderate decrease of the index of refraction and a moderate increase of the extinction coefficient in the visible and near infrared, while the optical band gap remained almost unchanged. These effects could be largely ascribed to ion-induced oxygen deficiency. When annealed in air, the already low resistivities of the implanted samples decreased further up to 70 °C, whereas oxidation, and hence a strong increase of the resistivity, was observed at higher annealing temperatures." @default.
- W2068503622 created "2016-06-24" @default.
- W2068503622 creator A5040933923 @default.
- W2068503622 creator A5069665776 @default.
- W2068503622 date "2007-05-01" @default.
- W2068503622 modified "2023-09-23" @default.
- W2068503622 title "Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering" @default.
- W2068503622 cites W1974484898 @default.
- W2068503622 cites W1985306055 @default.
- W2068503622 cites W1986043610 @default.
- W2068503622 cites W1986186350 @default.
- W2068503622 cites W1986816669 @default.
- W2068503622 cites W1988154094 @default.
- W2068503622 cites W1996060711 @default.
- W2068503622 cites W1996131522 @default.
- W2068503622 cites W1998223130 @default.
- W2068503622 cites W2017840224 @default.
- W2068503622 cites W2023085647 @default.
- W2068503622 cites W2029229449 @default.
- W2068503622 cites W2043101973 @default.
- W2068503622 cites W2043345910 @default.
- W2068503622 cites W2052349898 @default.
- W2068503622 cites W2053245474 @default.
- W2068503622 cites W2060501479 @default.
- W2068503622 cites W2067468835 @default.
- W2068503622 cites W2072859362 @default.
- W2068503622 cites W2077399084 @default.
- W2068503622 cites W2077438097 @default.
- W2068503622 cites W2078672736 @default.
- W2068503622 cites W2080439384 @default.
- W2068503622 cites W2133187115 @default.
- W2068503622 cites W2135406804 @default.
- W2068503622 cites W2141399311 @default.
- W2068503622 cites W2567203421 @default.
- W2068503622 doi "https://doi.org/10.1016/j.tsf.2006.12.179" @default.
- W2068503622 hasPublicationYear "2007" @default.
- W2068503622 type Work @default.
- W2068503622 sameAs 2068503622 @default.
- W2068503622 citedByCount "15" @default.
- W2068503622 countsByYear W20685036222012 @default.
- W2068503622 countsByYear W20685036222018 @default.
- W2068503622 countsByYear W20685036222019 @default.
- W2068503622 countsByYear W20685036222022 @default.
- W2068503622 countsByYear W20685036222023 @default.
- W2068503622 crossrefType "journal-article" @default.
- W2068503622 hasAuthorship W2068503622A5040933923 @default.
- W2068503622 hasAuthorship W2068503622A5069665776 @default.
- W2068503622 hasBestOaLocation W20685036222 @default.
- W2068503622 hasConcept C113196181 @default.
- W2068503622 hasConcept C119599485 @default.
- W2068503622 hasConcept C127413603 @default.
- W2068503622 hasConcept C145148216 @default.
- W2068503622 hasConcept C171250308 @default.
- W2068503622 hasConcept C178790620 @default.
- W2068503622 hasConcept C185592680 @default.
- W2068503622 hasConcept C19067145 @default.
- W2068503622 hasConcept C191897082 @default.
- W2068503622 hasConcept C192562407 @default.
- W2068503622 hasConcept C199289684 @default.
- W2068503622 hasConcept C22078206 @default.
- W2068503622 hasConcept C22423302 @default.
- W2068503622 hasConcept C2777855556 @default.
- W2068503622 hasConcept C41823505 @default.
- W2068503622 hasConcept C43617362 @default.
- W2068503622 hasConcept C542268612 @default.
- W2068503622 hasConcept C56052488 @default.
- W2068503622 hasConcept C61427134 @default.
- W2068503622 hasConcept C69990965 @default.
- W2068503622 hasConcept C8010536 @default.
- W2068503622 hasConceptScore W2068503622C113196181 @default.
- W2068503622 hasConceptScore W2068503622C119599485 @default.
- W2068503622 hasConceptScore W2068503622C127413603 @default.
- W2068503622 hasConceptScore W2068503622C145148216 @default.
- W2068503622 hasConceptScore W2068503622C171250308 @default.
- W2068503622 hasConceptScore W2068503622C178790620 @default.
- W2068503622 hasConceptScore W2068503622C185592680 @default.
- W2068503622 hasConceptScore W2068503622C19067145 @default.
- W2068503622 hasConceptScore W2068503622C191897082 @default.
- W2068503622 hasConceptScore W2068503622C192562407 @default.
- W2068503622 hasConceptScore W2068503622C199289684 @default.
- W2068503622 hasConceptScore W2068503622C22078206 @default.
- W2068503622 hasConceptScore W2068503622C22423302 @default.
- W2068503622 hasConceptScore W2068503622C2777855556 @default.
- W2068503622 hasConceptScore W2068503622C41823505 @default.
- W2068503622 hasConceptScore W2068503622C43617362 @default.
- W2068503622 hasConceptScore W2068503622C542268612 @default.
- W2068503622 hasConceptScore W2068503622C56052488 @default.
- W2068503622 hasConceptScore W2068503622C61427134 @default.
- W2068503622 hasConceptScore W2068503622C69990965 @default.
- W2068503622 hasConceptScore W2068503622C8010536 @default.
- W2068503622 hasIssue "13" @default.
- W2068503622 hasLocation W20685036221 @default.
- W2068503622 hasLocation W20685036222 @default.
- W2068503622 hasLocation W20685036223 @default.
- W2068503622 hasLocation W20685036224 @default.
- W2068503622 hasOpenAccess W2068503622 @default.
- W2068503622 hasPrimaryLocation W20685036221 @default.
- W2068503622 hasRelatedWork W2037515270 @default.