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• W2068557625 abstract "A newly developed vacuum sensor using carbon nanotube (CNT) field-emission has been designed. The fabricated device is an ionization gauge with a silk-like CNT yarn cathode, and the vacuum is indicated by the ratio of the ion current to the electron-emission current. The metrological characteristics of the sensor were studied in a dynamic vacuum system. It showed good linearity ranged from 10−4 to 10−1 Pa. Taking advantage of the field-emission cathode, the power consumption is only about 5.5 mW. Moreover, comparing it to the conventional thermionic cathode, the CNT yarn cathode is more miniature and a cold cathode with no obvious thermal outgassing effect. Due to these features, the sensor described here could have potential applications in measuring vacuum inside sealed and miniaturized devices." @default.
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• W2068557625 date "2012-02-01" @default.
• W2068557625 modified "2023-10-16" @default.
• W2068557625 title "A vacuum sensor using field emitters made by multiwalled carbon nanotube yarns" @default.
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• W2068557625 doi "https://doi.org/10.1016/j.vacuum.2011.04.027" @default.
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