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- W2068573110 abstract "A surface height variation measurement device based on the differential heterodyne interferometric scheme using new optical beam scanning techniques is described. An acousto- optic deflector (AOD) is driven by a signal which has two frequency components to generate two first-order diffraction beams at different frequencies for the probing light beams. The two beams, which have only a slight separation, are deflected by the AOD. The scanning distance of the two beams via the AOD can be extended using a Galvano mirror, which is driven synchronized with the AOD and scans the two beams in the same direction. The scanning direction of the two beams can be changed in various directions in the two-dimensional plane using a specially made rotating prism. The difference in surface height between the points where the two beams are incident is detected from the phase change of a beat signal with accuracies on the order of 1 nm. We applied this device to surface condition measurements, such as surface roughness, shape, and fine angle." @default.
- W2068573110 created "2016-06-24" @default.
- W2068573110 creator A5013325073 @default.
- W2068573110 date "1992-10-20" @default.
- W2068573110 modified "2023-10-16" @default.
- W2068573110 title "<title>Surface condition measurement using optical heterodyne method</title>" @default.
- W2068573110 doi "https://doi.org/10.1117/12.132158" @default.
- W2068573110 hasPublicationYear "1992" @default.
- W2068573110 type Work @default.
- W2068573110 sameAs 2068573110 @default.
- W2068573110 citedByCount "1" @default.
- W2068573110 crossrefType "proceedings-article" @default.
- W2068573110 hasAuthorship W2068573110A5013325073 @default.
- W2068573110 hasConcept C107365816 @default.
- W2068573110 hasConcept C120665830 @default.
- W2068573110 hasConcept C121332964 @default.
- W2068573110 hasConcept C166689943 @default.
- W2068573110 hasConcept C168834538 @default.
- W2068573110 hasConcept C189809214 @default.
- W2068573110 hasConcept C191463272 @default.
- W2068573110 hasConcept C192562407 @default.
- W2068573110 hasConcept C199360897 @default.
- W2068573110 hasConcept C204003914 @default.
- W2068573110 hasConcept C207114421 @default.
- W2068573110 hasConcept C24890656 @default.
- W2068573110 hasConcept C2779843651 @default.
- W2068573110 hasConcept C2780497637 @default.
- W2068573110 hasConcept C41008148 @default.
- W2068573110 hasConcept C520434653 @default.
- W2068573110 hasConcept C62520636 @default.
- W2068573110 hasConcept C67666897 @default.
- W2068573110 hasConcept C79261456 @default.
- W2068573110 hasConceptScore W2068573110C107365816 @default.
- W2068573110 hasConceptScore W2068573110C120665830 @default.
- W2068573110 hasConceptScore W2068573110C121332964 @default.
- W2068573110 hasConceptScore W2068573110C166689943 @default.
- W2068573110 hasConceptScore W2068573110C168834538 @default.
- W2068573110 hasConceptScore W2068573110C189809214 @default.
- W2068573110 hasConceptScore W2068573110C191463272 @default.
- W2068573110 hasConceptScore W2068573110C192562407 @default.
- W2068573110 hasConceptScore W2068573110C199360897 @default.
- W2068573110 hasConceptScore W2068573110C204003914 @default.
- W2068573110 hasConceptScore W2068573110C207114421 @default.
- W2068573110 hasConceptScore W2068573110C24890656 @default.
- W2068573110 hasConceptScore W2068573110C2779843651 @default.
- W2068573110 hasConceptScore W2068573110C2780497637 @default.
- W2068573110 hasConceptScore W2068573110C41008148 @default.
- W2068573110 hasConceptScore W2068573110C520434653 @default.
- W2068573110 hasConceptScore W2068573110C62520636 @default.
- W2068573110 hasConceptScore W2068573110C67666897 @default.
- W2068573110 hasConceptScore W2068573110C79261456 @default.
- W2068573110 hasLocation W20685731101 @default.
- W2068573110 hasOpenAccess W2068573110 @default.
- W2068573110 hasPrimaryLocation W20685731101 @default.
- W2068573110 hasRelatedWork W1972941289 @default.
- W2068573110 hasRelatedWork W1980532511 @default.
- W2068573110 hasRelatedWork W1982856352 @default.
- W2068573110 hasRelatedWork W1996778195 @default.
- W2068573110 hasRelatedWork W2000343604 @default.
- W2068573110 hasRelatedWork W2026541830 @default.
- W2068573110 hasRelatedWork W2047274030 @default.
- W2068573110 hasRelatedWork W2060154609 @default.
- W2068573110 hasRelatedWork W2158520242 @default.
- W2068573110 hasRelatedWork W2599943732 @default.
- W2068573110 isParatext "false" @default.
- W2068573110 isRetracted "false" @default.
- W2068573110 magId "2068573110" @default.
- W2068573110 workType "article" @default.