FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068611009> ?p ?o ?g. }

• W2068611009 endingPage "1280" @default.
• W2068611009 startingPage "1251" @default.
• W2068611009 abstract "This paper describes the development of a reduced order model-based feedback control methodology for regulation of the growth of thin films in a high-pressure chemical vapor deposition (HPCVD) reactor. Precise control of the film thickness and composition is highly desirable, making real-time control of the deposition process very important. The source vapor species transport is modeled by the standard gas dynamics partial differential equations, with species decomposition reactions, reduced down to a small number of ordinary differential equations through use of the proper orthogonal decomposition technique. This system is coupled with a reduced order model of the surface reactions involved in the source vapor decomposition and film growth on the substrate. Also modeled is the real-time observation technique used to obtain a partial measurement of the deposition process. The utilization of reduced order models greatly simplifies the mathematical formulation of the physical process so that it can be solved quickly enough to be used for real-time model-based feedback control. This control problem is fairly complicated, however, because the surface reactions render the model nonlinear. To deal with this we use a nonlinear feedback control method based on the state-dependent Riccati equation (SDRE). A second SDRE is contained in a state estimator which uses the nonlinear partial observations of the growth process to obtain an estimated state on which to base the feedback control. These nonlinear control techniques are implemented on the HPCVD model, and the results analyzed as to the effectiveness of the reduced order model and nonlinear control at tracking the desired film growth profile." @default.
• W2068611009 created "2016-06-24" @default.
• W2068611009 creator A5024493281 @default.
• W2068611009 creator A5047563873 @default.
• W2068611009 creator A5068637661 @default.
• W2068611009 creator A5071359085 @default.
• W2068611009 date "2002-01-01" @default.
• W2068611009 modified "2023-09-23" @default.
• W2068611009 title "Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor" @default.
• W2068611009 cites W1633776202 @default.
• W2068611009 cites W1973562302 @default.
• W2068611009 cites W1977804990 @default.
• W2068611009 cites W1981647530 @default.
• W2068611009 cites W1984961557 @default.
• W2068611009 cites W1985570191 @default.
• W2068611009 cites W1989951672 @default.
• W2068611009 cites W2001335145 @default.
• W2068611009 cites W2009327160 @default.
• W2068611009 cites W2019304282 @default.
• W2068611009 cites W2046508558 @default.
• W2068611009 cites W2048225205 @default.
• W2068611009 cites W2051994050 @default.
• W2068611009 cites W2063181764 @default.
• W2068611009 cites W2087305961 @default.
• W2068611009 cites W2120818273 @default.
• W2068611009 cites W2125225415 @default.
• W2068611009 cites W2144768482 @default.
• W2068611009 cites W2165285587 @default.
• W2068611009 cites W2167387073 @default.
• W2068611009 cites W4233738667 @default.
• W2068611009 doi "https://doi.org/10.1137/s0036139901383280" @default.
• W2068611009 hasPublicationYear "2002" @default.
• W2068611009 type Work @default.
• W2068611009 sameAs 2068611009 @default.
• W2068611009 citedByCount "35" @default.
• W2068611009 countsByYear W20686110092012 @default.
• W2068611009 countsByYear W20686110092013 @default.
• W2068611009 countsByYear W20686110092014 @default.
• W2068611009 countsByYear W20686110092015 @default.
• W2068611009 countsByYear W20686110092016 @default.
• W2068611009 countsByYear W20686110092018 @default.
• W2068611009 crossrefType "journal-article" @default.
• W2068611009 hasAuthorship W2068611009A5024493281 @default.
• W2068611009 hasAuthorship W2068611009A5047563873 @default.
• W2068611009 hasAuthorship W2068611009A5068637661 @default.
• W2068611009 hasAuthorship W2068611009A5071359085 @default.
• W2068611009 hasBestOaLocation W20686110092 @default.
• W2068611009 hasConcept C111919701 @default.
• W2068611009 hasConcept C121332964 @default.
• W2068611009 hasConcept C126255220 @default.
• W2068611009 hasConcept C127413603 @default.
• W2068611009 hasConcept C133731056 @default.
• W2068611009 hasConcept C134306372 @default.
• W2068611009 hasConcept C151730666 @default.
• W2068611009 hasConcept C154945302 @default.
• W2068611009 hasConcept C155386361 @default.
• W2068611009 hasConcept C158622935 @default.
• W2068611009 hasConcept C2775924081 @default.
• W2068611009 hasConcept C2816523 @default.
• W2068611009 hasConcept C33923547 @default.
• W2068611009 hasConcept C41008148 @default.
• W2068611009 hasConcept C45473103 @default.
• W2068611009 hasConcept C47446073 @default.
• W2068611009 hasConcept C51544822 @default.
• W2068611009 hasConcept C536315585 @default.
• W2068611009 hasConcept C62520636 @default.
• W2068611009 hasConcept C64297162 @default.
• W2068611009 hasConcept C78045399 @default.
• W2068611009 hasConcept C86803240 @default.
• W2068611009 hasConcept C91575142 @default.
• W2068611009 hasConcept C93779851 @default.
• W2068611009 hasConcept C98045186 @default.
• W2068611009 hasConceptScore W2068611009C111919701 @default.
• W2068611009 hasConceptScore W2068611009C121332964 @default.
• W2068611009 hasConceptScore W2068611009C126255220 @default.
• W2068611009 hasConceptScore W2068611009C127413603 @default.
• W2068611009 hasConceptScore W2068611009C133731056 @default.
• W2068611009 hasConceptScore W2068611009C134306372 @default.
• W2068611009 hasConceptScore W2068611009C151730666 @default.
• W2068611009 hasConceptScore W2068611009C154945302 @default.
• W2068611009 hasConceptScore W2068611009C155386361 @default.
• W2068611009 hasConceptScore W2068611009C158622935 @default.
• W2068611009 hasConceptScore W2068611009C2775924081 @default.
• W2068611009 hasConceptScore W2068611009C2816523 @default.
• W2068611009 hasConceptScore W2068611009C33923547 @default.
• W2068611009 hasConceptScore W2068611009C41008148 @default.
• W2068611009 hasConceptScore W2068611009C45473103 @default.
• W2068611009 hasConceptScore W2068611009C47446073 @default.
• W2068611009 hasConceptScore W2068611009C51544822 @default.
• W2068611009 hasConceptScore W2068611009C536315585 @default.
• W2068611009 hasConceptScore W2068611009C62520636 @default.
• W2068611009 hasConceptScore W2068611009C64297162 @default.
• W2068611009 hasConceptScore W2068611009C78045399 @default.
• W2068611009 hasConceptScore W2068611009C86803240 @default.
• W2068611009 hasConceptScore W2068611009C91575142 @default.
• W2068611009 hasConceptScore W2068611009C93779851 @default.
• W2068611009 hasConceptScore W2068611009C98045186 @default.
• W2068611009 hasIssue "4" @default.

• next