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- W2068642766 abstract "A novel photoresist-free process used for fabrication of Ti:LiNbO 3 waveguides is proposed and demonstrated. In this process, smooth waveguide patterning of TiO 2 channels can be performed by laser-beam (LB) direct writing at up to 0.2 mm/s, where Ti film deposited on LiNbO 3 is thermally oxidized in air by the focused Ar + laser beam. LB writing has sufficiently high accuracy for waveguide patterning because the Ti film thickness is usually below 0.1 µm. Unlike the previously reported resist-free processes, the process demonstrated here does not require any specific tools or materials, and can provide Ti:LiNbO 3 waveguides more easily. It was also confirmed that there are no marked differences in guiding properties between two Ti:LiNbO 3 waveguides fabricated by the proposed resist-free process and the standard process based on waveguide patterning in photoresist as thick as 1 µm." @default.
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- W2068642766 date "1992-05-01" @default.
- W2068642766 modified "2023-09-23" @default.
- W2068642766 title "Laser-Beam Direct Writing of TiO<sub>2</sub> Channels for Fabrication of Ti:LiNbO<sub>3</sub> Waveguides" @default.
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- W2068642766 doi "https://doi.org/10.1143/jjap.31.1593" @default.
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