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- W2068676282 abstract "This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed sensor is showing good performance than other miniaturized sensor structures reported thus far." @default.
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- W2068676282 date "2008-11-01" @default.
- W2068676282 modified "2023-09-27" @default.
- W2068676282 title "Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications" @default.
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- W2068676282 doi "https://doi.org/10.1109/mhs.2008.4752419" @default.
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