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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068679931> ?p ?o ?g. }

• W2068679931 endingPage "1262" @default.
• W2068679931 startingPage "1258" @default.
• W2068679931 abstract "We use cathodoluminescence spectroscopy (CLS) to investigate the electronic states of ultrathin gate dielectrics with nitrided SiO2–Si interfaces, known to improve reliability in advanced complementary metal–oxide–semiconductor devices. The 5 nm thick films investigated were: (i) as-deposited (at 300 °C) structures, (ii) 400 °C hydrogen anneal, (iii) 900 °C rapid thermal anneal (RTA), and (iv) a combination of both anneals. CLS emission energies and intensities versus excitation energy were essentially unchanged for the as-deposited interface compared to non-nitrided plasma-processed interfaces. In the near-infrared, features appear at 0.8 and 1.0 eV, with the 1.0 eV peak Si substrate intensity increasing with increasing depth. From depth variation measurements at higher photon energy, a 3.4 eV peak is also shown to arise from the Si substrate, and a 2.7 eV feature is shown to come from the interface region. After hydrogenation, the CLS is essentially the same as for non-nitrided interfaces, except for an increase in the relative intensity of a broad background luminescence ranging from 1.5 to 2.5 eV. However, the RTA and the combination of the RTA and hydrogenation do not completely suppress emission near 2.0 eV feature as for non-nitrided interfaces. From the behavior of the CLS features, we are able to clearly distinguish between interfacial defects and substrate features, which are significantly reduced by the combined RTA/hydrogen anneal, and features that are not reduced by the annealing procedures." @default.
• W2068679931 created "2016-06-24" @default.
• W2068679931 creator A5023264667 @default.
• W2068679931 creator A5030018313 @default.
• W2068679931 creator A5042609575 @default.
• W2068679931 creator A5075049531 @default.
• W2068679931 creator A5078803237 @default.
• W2068679931 date "1999-07-01" @default.
• W2068679931 modified "2023-10-18" @default.
• W2068679931 title "Cathodoluminescence spectroscopy of nitrided SiO2–Si interfaces" @default.
• W2068679931 cites W1991427193 @default.
• W2068679931 cites W1994853664 @default.
• W2068679931 cites W2003546681 @default.
• W2068679931 cites W2024411515 @default.
• W2068679931 cites W2034186947 @default.
• W2068679931 cites W2050972474 @default.
• W2068679931 cites W2055881715 @default.
• W2068679931 cites W2063188684 @default.
• W2068679931 cites W2063390311 @default.
• W2068679931 cites W2071533078 @default.
• W2068679931 cites W2077080633 @default.
• W2068679931 cites W2140413030 @default.
• W2068679931 doi "https://doi.org/10.1116/1.581806" @default.
• W2068679931 hasPublicationYear "1999" @default.
• W2068679931 type Work @default.
• W2068679931 sameAs 2068679931 @default.
• W2068679931 citedByCount "7" @default.
• W2068679931 countsByYear W20686799312016 @default.
• W2068679931 crossrefType "journal-article" @default.
• W2068679931 hasAuthorship W2068679931A5023264667 @default.
• W2068679931 hasAuthorship W2068679931A5030018313 @default.
• W2068679931 hasAuthorship W2068679931A5042609575 @default.
• W2068679931 hasAuthorship W2068679931A5075049531 @default.
• W2068679931 hasAuthorship W2068679931A5078803237 @default.
• W2068679931 hasBestOaLocation W20686799312 @default.
• W2068679931 hasConcept C108225325 @default.
• W2068679931 hasConcept C111368507 @default.
• W2068679931 hasConcept C113196181 @default.
• W2068679931 hasConcept C121332964 @default.
• W2068679931 hasConcept C127313418 @default.
• W2068679931 hasConcept C13862629 @default.
• W2068679931 hasConcept C139861200 @default.
• W2068679931 hasConcept C148869448 @default.
• W2068679931 hasConcept C171250308 @default.
• W2068679931 hasConcept C178790620 @default.
• W2068679931 hasConcept C185592680 @default.
• W2068679931 hasConcept C191897082 @default.
• W2068679931 hasConcept C192562407 @default.
• W2068679931 hasConcept C2777289219 @default.
• W2068679931 hasConcept C2777855556 @default.
• W2068679931 hasConcept C2779227376 @default.
• W2068679931 hasConcept C32891209 @default.
• W2068679931 hasConcept C43617362 @default.
• W2068679931 hasConcept C49040817 @default.
• W2068679931 hasConcept C512968161 @default.
• W2068679931 hasConcept C544956773 @default.
• W2068679931 hasConcept C62520636 @default.
• W2068679931 hasConceptScore W2068679931C108225325 @default.
• W2068679931 hasConceptScore W2068679931C111368507 @default.
• W2068679931 hasConceptScore W2068679931C113196181 @default.
• W2068679931 hasConceptScore W2068679931C121332964 @default.
• W2068679931 hasConceptScore W2068679931C127313418 @default.
• W2068679931 hasConceptScore W2068679931C13862629 @default.
• W2068679931 hasConceptScore W2068679931C139861200 @default.
• W2068679931 hasConceptScore W2068679931C148869448 @default.
• W2068679931 hasConceptScore W2068679931C171250308 @default.
• W2068679931 hasConceptScore W2068679931C178790620 @default.
• W2068679931 hasConceptScore W2068679931C185592680 @default.
• W2068679931 hasConceptScore W2068679931C191897082 @default.
• W2068679931 hasConceptScore W2068679931C192562407 @default.
• W2068679931 hasConceptScore W2068679931C2777289219 @default.
• W2068679931 hasConceptScore W2068679931C2777855556 @default.
• W2068679931 hasConceptScore W2068679931C2779227376 @default.
• W2068679931 hasConceptScore W2068679931C32891209 @default.
• W2068679931 hasConceptScore W2068679931C43617362 @default.
• W2068679931 hasConceptScore W2068679931C49040817 @default.
• W2068679931 hasConceptScore W2068679931C512968161 @default.
• W2068679931 hasConceptScore W2068679931C544956773 @default.
• W2068679931 hasConceptScore W2068679931C62520636 @default.
• W2068679931 hasIssue "4" @default.
• W2068679931 hasLocation W20686799311 @default.
• W2068679931 hasLocation W20686799312 @default.
• W2068679931 hasOpenAccess W2068679931 @default.
• W2068679931 hasPrimaryLocation W20686799311 @default.
• W2068679931 hasRelatedWork W1547278552 @default.
• W2068679931 hasRelatedWork W177005867 @default.
• W2068679931 hasRelatedWork W1877881414 @default.
• W2068679931 hasRelatedWork W1965200010 @default.
• W2068679931 hasRelatedWork W1966986020 @default.
• W2068679931 hasRelatedWork W2031265723 @default.
• W2068679931 hasRelatedWork W2034767993 @default.
• W2068679931 hasRelatedWork W2056230013 @default.
• W2068679931 hasRelatedWork W2092438402 @default.
• W2068679931 hasRelatedWork W2612745506 @default.
• W2068679931 hasVolume "17" @default.
• W2068679931 isParatext "false" @default.
• W2068679931 isRetracted "false" @default.
• W2068679931 magId "2068679931" @default.

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