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- W2068695917 abstract "The gas phase reaction in a mercury-sensitized decomposition of SiH 4 under usual conditions for photo-CVD of a-Si:H was analyzed by means of mass spectroscopy. Reaction rates, i.e., the decomposition rate of SiH 4 and the generation rates of Si 2 H 6 and Si 3 H 8 , were measured. The reaction mechanism is summarized in twelve reaction steps, and rate equations were derived to explain substantially the obtained experimental results. Based on the rate equations, some rate constants were evaluated. The effect of H 2 dilution of a chemical reaction was also discussed." @default.
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- W2068695917 date "1988-06-01" @default.
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- W2068695917 title "Gas Phase Reaction Kinetics in Mercury-Photosensitized Decomposition of SiH<sub>4</sub>" @default.
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