Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068705951> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2068705951 endingPage "04DB15" @default.
- W2068705951 startingPage "04DB15" @default.
- W2068705951 abstract "A novel multilayered Ni–Zn-ferrite/TaN (MFT) film is developed for RF/mobile complementary metal oxide semiconductor (CMOS) applications. The Ni–Zn ferrite (Ni 0.5 Zn 0.5 Fe 2 O 4 ) film is deposited by low-temperature RF magnetron sputtering technique applicable for conventional low- k /Cu interconnects in advanced CMOS LSI. In the MFT film, a stacking unit of thin Ni–Zn-ferrite and thin TaN is laminated to enhance the ferrite (311) spinel orientation close to the magnetization easy axis of the ferrite. The saturated magnetization ( M s ) increased 50% referred to the single-layer Ni–Zn-ferrite/TaN, and the coercivity ( H c ) decreased one-fifth desirable for the high speed switching. By physical-based modeling, it is proved that the fraction of the (311)-orientation region in the total ferrite thickness is very important to improve the magnetic properties. In addition to the high resistivity (ρ=10 MΩ cm) to suppress eddy current loss, the MFT film is effective to confine and enhance the magnetic field in the on-chip inductor in GHz range, suitable for RF/mobile applications." @default.
- W2068705951 created "2016-06-24" @default.
- W2068705951 creator A5003435520 @default.
- W2068705951 creator A5016204078 @default.
- W2068705951 creator A5033316886 @default.
- W2068705951 creator A5084117432 @default.
- W2068705951 date "2010-04-01" @default.
- W2068705951 modified "2023-09-27" @default.
- W2068705951 title "A Novel Multilayered Ni–Zn-Ferrite/TaN Film for RF/Mobile Applications" @default.
- W2068705951 cites W1976672888 @default.
- W2068705951 cites W1995894872 @default.
- W2068705951 cites W1998299148 @default.
- W2068705951 cites W1998744681 @default.
- W2068705951 cites W2007498347 @default.
- W2068705951 cites W2024846764 @default.
- W2068705951 cites W2068890194 @default.
- W2068705951 cites W2071255035 @default.
- W2068705951 cites W2078458252 @default.
- W2068705951 cites W2088351666 @default.
- W2068705951 cites W2098551897 @default.
- W2068705951 cites W2100925189 @default.
- W2068705951 cites W2110454889 @default.
- W2068705951 cites W2116682439 @default.
- W2068705951 cites W2145045370 @default.
- W2068705951 cites W2152991419 @default.
- W2068705951 cites W2168931927 @default.
- W2068705951 cites W4243786684 @default.
- W2068705951 doi "https://doi.org/10.1143/jjap.49.04db15" @default.
- W2068705951 hasPublicationYear "2010" @default.
- W2068705951 type Work @default.
- W2068705951 sameAs 2068705951 @default.
- W2068705951 citedByCount "0" @default.
- W2068705951 crossrefType "journal-article" @default.
- W2068705951 hasAuthorship W2068705951A5003435520 @default.
- W2068705951 hasAuthorship W2068705951A5016204078 @default.
- W2068705951 hasAuthorship W2068705951A5033316886 @default.
- W2068705951 hasAuthorship W2068705951A5084117432 @default.
- W2068705951 hasConcept C115260700 @default.
- W2068705951 hasConcept C121332964 @default.
- W2068705951 hasConcept C126530901 @default.
- W2068705951 hasConcept C159985019 @default.
- W2068705951 hasConcept C171250308 @default.
- W2068705951 hasConcept C19067145 @default.
- W2068705951 hasConcept C191897082 @default.
- W2068705951 hasConcept C192562407 @default.
- W2068705951 hasConcept C22423302 @default.
- W2068705951 hasConcept C26873012 @default.
- W2068705951 hasConcept C2776230739 @default.
- W2068705951 hasConcept C32546565 @default.
- W2068705951 hasConcept C33347731 @default.
- W2068705951 hasConcept C37210646 @default.
- W2068705951 hasConcept C46141821 @default.
- W2068705951 hasConcept C49040817 @default.
- W2068705951 hasConcept C62520636 @default.
- W2068705951 hasConceptScore W2068705951C115260700 @default.
- W2068705951 hasConceptScore W2068705951C121332964 @default.
- W2068705951 hasConceptScore W2068705951C126530901 @default.
- W2068705951 hasConceptScore W2068705951C159985019 @default.
- W2068705951 hasConceptScore W2068705951C171250308 @default.
- W2068705951 hasConceptScore W2068705951C19067145 @default.
- W2068705951 hasConceptScore W2068705951C191897082 @default.
- W2068705951 hasConceptScore W2068705951C192562407 @default.
- W2068705951 hasConceptScore W2068705951C22423302 @default.
- W2068705951 hasConceptScore W2068705951C26873012 @default.
- W2068705951 hasConceptScore W2068705951C2776230739 @default.
- W2068705951 hasConceptScore W2068705951C32546565 @default.
- W2068705951 hasConceptScore W2068705951C33347731 @default.
- W2068705951 hasConceptScore W2068705951C37210646 @default.
- W2068705951 hasConceptScore W2068705951C46141821 @default.
- W2068705951 hasConceptScore W2068705951C49040817 @default.
- W2068705951 hasConceptScore W2068705951C62520636 @default.
- W2068705951 hasIssue "4S" @default.
- W2068705951 hasLocation W20687059511 @default.
- W2068705951 hasOpenAccess W2068705951 @default.
- W2068705951 hasPrimaryLocation W20687059511 @default.
- W2068705951 hasRelatedWork W1538713125 @default.
- W2068705951 hasRelatedWork W1968497764 @default.
- W2068705951 hasRelatedWork W2063954288 @default.
- W2068705951 hasRelatedWork W2105333646 @default.
- W2068705951 hasRelatedWork W2333676803 @default.
- W2068705951 hasRelatedWork W2361372579 @default.
- W2068705951 hasRelatedWork W2374395587 @default.
- W2068705951 hasRelatedWork W2999110788 @default.
- W2068705951 hasRelatedWork W3205341294 @default.
- W2068705951 hasRelatedWork W4321498292 @default.
- W2068705951 hasVolume "49" @default.
- W2068705951 isParatext "false" @default.
- W2068705951 isRetracted "false" @default.
- W2068705951 magId "2068705951" @default.
- W2068705951 workType "article" @default.