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• W2068709062 abstract "Abstract Studies are performed to evaluate the effect of discharge power, pressure, and sampling position on the kinetic energy of ions sampled from a radio frequency glow discharge (rf-GD) source. The average kinetic energy of ions decreases with increases in discharge power (20–40 W) and pressure (130–300 mTorr), with typical values lying in the range of 10–14 eV. Average ion kinetic energy (1KE) values increase at longer sampling distances from the cathode surface. The fundamental plasma parameters of positive ion number density (ni) and plasma floating potential (Vf) are also measured via a Langmuir probe technique in order to investigate their relationships to the extracted ion beam characteristics. Total ion beam currents measured on a Faraday plate mounted behind the sampling cone reveal that the positive ion density and beam current track each other with respect to changes in discharge power and sampling position. The obtained IKE distributions are dominated by a broad, low energy peak extending from 0-to-20 eV with a high energy shoulder, which is indicative of rf modulation effects. Average IKEs track Vf as a function of power, pressure and sampling distance. The IKEs measured here are much lower than Vj (by −12 eV in most cases), suggesting that rf modulation effects and collisions in the anode sheath influence the observed energies." @default.
• W2068709062 created "2016-06-24" @default.
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• W2068709062 date "1997-09-01" @default.
• W2068709062 modified "2023-09-27" @default.
• W2068709062 title "Ion kinetic energy distributions and their relationship to fundamental plasma parameters in a radio frequency glow discharge source" @default.
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• W2068709062 doi "https://doi.org/10.1016/s0584-8547(97)00059-1" @default.
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