Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068755944> ?p ?o ?g. }
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97
with 100 items per page.
- W2068755944 endingPage "424" @default.
- W2068755944 startingPage "421" @default.
- W2068755944 abstract "The initial stage of oxidation of hydrogen-terminated Si(100) surfaces in dry oxygen gas has been studied using Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. Heating the wafer up to 300°C in vacuum caused the desorption of hydrogen primarily from defects such as steps on the surface, and the following preoxidation in dry oxygen at 300°C progressed therein. The preoxides thus formed on surfaces were stable during thermal oxidation at 900°C, preventing an increase of the surface microroughness caused during heating the wafer at high temperatures. Such preoxides prior to thermal oxidation were also found to cause structural modification of very thin oxide films." @default.
- W2068755944 created "2016-06-24" @default.
- W2068755944 creator A5004377553 @default.
- W2068755944 creator A5036113297 @default.
- W2068755944 creator A5051145689 @default.
- W2068755944 creator A5089644131 @default.
- W2068755944 date "1996-07-01" @default.
- W2068755944 modified "2023-10-16" @default.
- W2068755944 title "Initial stage of oxidation of Si(100) surfaces in dry oxygen" @default.
- W2068755944 cites W1977859999 @default.
- W2068755944 cites W2013934710 @default.
- W2068755944 cites W2020287905 @default.
- W2068755944 cites W2037026858 @default.
- W2068755944 cites W2045511640 @default.
- W2068755944 cites W2063140846 @default.
- W2068755944 cites W2068397897 @default.
- W2068755944 cites W2084712357 @default.
- W2068755944 cites W2273886880 @default.
- W2068755944 doi "https://doi.org/10.1016/0169-4332(96)00312-1" @default.
- W2068755944 hasPublicationYear "1996" @default.
- W2068755944 type Work @default.
- W2068755944 sameAs 2068755944 @default.
- W2068755944 citedByCount "5" @default.
- W2068755944 countsByYear W20687559442012 @default.
- W2068755944 crossrefType "journal-article" @default.
- W2068755944 hasAuthorship W2068755944A5004377553 @default.
- W2068755944 hasAuthorship W2068755944A5036113297 @default.
- W2068755944 hasAuthorship W2068755944A5051145689 @default.
- W2068755944 hasAuthorship W2068755944A5089644131 @default.
- W2068755944 hasConcept C113196181 @default.
- W2068755944 hasConcept C120665830 @default.
- W2068755944 hasConcept C121332964 @default.
- W2068755944 hasConcept C127413603 @default.
- W2068755944 hasConcept C147789679 @default.
- W2068755944 hasConcept C150394285 @default.
- W2068755944 hasConcept C153642686 @default.
- W2068755944 hasConcept C155916967 @default.
- W2068755944 hasConcept C158355884 @default.
- W2068755944 hasConcept C160671074 @default.
- W2068755944 hasConcept C160892712 @default.
- W2068755944 hasConcept C162711632 @default.
- W2068755944 hasConcept C171250308 @default.
- W2068755944 hasConcept C175708663 @default.
- W2068755944 hasConcept C178790620 @default.
- W2068755944 hasConcept C185592680 @default.
- W2068755944 hasConcept C191897082 @default.
- W2068755944 hasConcept C192562407 @default.
- W2068755944 hasConcept C2779281663 @default.
- W2068755944 hasConcept C2779851234 @default.
- W2068755944 hasConcept C2781059571 @default.
- W2068755944 hasConcept C42360764 @default.
- W2068755944 hasConcept C512968161 @default.
- W2068755944 hasConcept C540031477 @default.
- W2068755944 hasConceptScore W2068755944C113196181 @default.
- W2068755944 hasConceptScore W2068755944C120665830 @default.
- W2068755944 hasConceptScore W2068755944C121332964 @default.
- W2068755944 hasConceptScore W2068755944C127413603 @default.
- W2068755944 hasConceptScore W2068755944C147789679 @default.
- W2068755944 hasConceptScore W2068755944C150394285 @default.
- W2068755944 hasConceptScore W2068755944C153642686 @default.
- W2068755944 hasConceptScore W2068755944C155916967 @default.
- W2068755944 hasConceptScore W2068755944C158355884 @default.
- W2068755944 hasConceptScore W2068755944C160671074 @default.
- W2068755944 hasConceptScore W2068755944C160892712 @default.
- W2068755944 hasConceptScore W2068755944C162711632 @default.
- W2068755944 hasConceptScore W2068755944C171250308 @default.
- W2068755944 hasConceptScore W2068755944C175708663 @default.
- W2068755944 hasConceptScore W2068755944C178790620 @default.
- W2068755944 hasConceptScore W2068755944C185592680 @default.
- W2068755944 hasConceptScore W2068755944C191897082 @default.
- W2068755944 hasConceptScore W2068755944C192562407 @default.
- W2068755944 hasConceptScore W2068755944C2779281663 @default.
- W2068755944 hasConceptScore W2068755944C2779851234 @default.
- W2068755944 hasConceptScore W2068755944C2781059571 @default.
- W2068755944 hasConceptScore W2068755944C42360764 @default.
- W2068755944 hasConceptScore W2068755944C512968161 @default.
- W2068755944 hasConceptScore W2068755944C540031477 @default.
- W2068755944 hasLocation W20687559441 @default.
- W2068755944 hasOpenAccess W2068755944 @default.
- W2068755944 hasPrimaryLocation W20687559441 @default.
- W2068755944 hasRelatedWork W18912266 @default.
- W2068755944 hasRelatedWork W1966850573 @default.
- W2068755944 hasRelatedWork W2002210549 @default.
- W2068755944 hasRelatedWork W2017019007 @default.
- W2068755944 hasRelatedWork W2044683426 @default.
- W2068755944 hasRelatedWork W2050690865 @default.
- W2068755944 hasRelatedWork W2057516850 @default.
- W2068755944 hasRelatedWork W2066438544 @default.
- W2068755944 hasRelatedWork W2066895025 @default.
- W2068755944 hasRelatedWork W2067223424 @default.
- W2068755944 hasVolume "100-101" @default.
- W2068755944 isParatext "false" @default.
- W2068755944 isRetracted "false" @default.
- W2068755944 magId "2068755944" @default.
- W2068755944 workType "article" @default.