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- W2068758878 abstract "In this work, we develop a microelectromechanical digital-to-analog converter (MEM-DAC) device which serves as a reference mirror with precise nanoscale step motion for a white-light interferometry system. The proposed mechanism converts a 4-bit digital signal to a mechanical out-of-plane displacement that is proportional to the analog value represented by the 4-bit binary code. A fabrication process which can realize a relatively large movable mirror without etching holes is proposed. Measured results are also presented." @default.
- W2068758878 created "2016-06-24" @default.
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- W2068758878 date "2010-01-01" @default.
- W2068758878 modified "2023-09-25" @default.
- W2068758878 title "A microelectromechanical digital-to-analog converter for generating step-motion of reference mirror in a white-light interferometry system" @default.
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- W2068758878 doi "https://doi.org/10.1109/nems.2010.5592459" @default.
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