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- W2068759840 abstract "BF2+ implantation and low temperature furnace annealing are used to form Ti silicide and shallow junctions for samples with multilayers of Si/Ti/Si. The formation of Ti silicides and the shallow junctions is investigated by Rutherford backscattering, the 19F(p,αγ) nuclear reaction, Cu Kα X-ray diffraction and spreading resistance measurement. The mechanism of interaction of Ti and Si, and the influences of impurities F, O and a thin amorphous Si surface layer are discussed." @default.
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- W2068759840 date "1989-03-01" @default.
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- W2068759840 title "Formation of titanium silicide and shallow junctions by BF2+ implantation and low temperature annealing" @default.
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- W2068759840 doi "https://doi.org/10.1016/0168-583x(89)90789-1" @default.
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