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- W2068779852 abstract "Radio frequency (RF) generators are one of the critical components for RF delivery systems in plasma applications. The main components of a typical RF power delivery system are RF generator, matching network, and plasma power and impedance monitoring device1. The interaction between specifically RF generator and the plasma chamber carries great importance due to dynamic structure of the plasma impedance. Plasma impedance can vary from impedance values with very low voltage standing wave ratios (VSWRs) to impedance values with high VSWRs in a very short period of time for certain processes. If RF plasma generator can not deliver the desired amount of power at the specific steps during plasma processes, then plasma can not sustain. Furthermore, there might be a high amount of reflected RF power back to the generator that can cause operational failure." @default.
- W2068779852 created "2016-06-24" @default.
- W2068779852 creator A5063737526 @default.
- W2068779852 creator A5091559775 @default.
- W2068779852 date "2014-05-01" @default.
- W2068779852 modified "2023-09-26" @default.
- W2068779852 title "Investigation of RF generator response to plasma instabilities" @default.
- W2068779852 doi "https://doi.org/10.1109/plasma.2014.7012300" @default.
- W2068779852 hasPublicationYear "2014" @default.
- W2068779852 type Work @default.
- W2068779852 sameAs 2068779852 @default.
- W2068779852 citedByCount "0" @default.
- W2068779852 crossrefType "proceedings-article" @default.
- W2068779852 hasAuthorship W2068779852A5063737526 @default.
- W2068779852 hasAuthorship W2068779852A5091559775 @default.
- W2068779852 hasConcept C101094754 @default.
- W2068779852 hasConcept C119599485 @default.
- W2068779852 hasConcept C121332964 @default.
- W2068779852 hasConcept C127413603 @default.
- W2068779852 hasConcept C163258240 @default.
- W2068779852 hasConcept C17829176 @default.
- W2068779852 hasConcept C192562407 @default.
- W2068779852 hasConcept C194257627 @default.
- W2068779852 hasConcept C196054291 @default.
- W2068779852 hasConcept C2780992000 @default.
- W2068779852 hasConcept C46362747 @default.
- W2068779852 hasConcept C49040817 @default.
- W2068779852 hasConcept C58112919 @default.
- W2068779852 hasConcept C612350 @default.
- W2068779852 hasConcept C62520636 @default.
- W2068779852 hasConcept C74064498 @default.
- W2068779852 hasConcept C82706917 @default.
- W2068779852 hasConceptScore W2068779852C101094754 @default.
- W2068779852 hasConceptScore W2068779852C119599485 @default.
- W2068779852 hasConceptScore W2068779852C121332964 @default.
- W2068779852 hasConceptScore W2068779852C127413603 @default.
- W2068779852 hasConceptScore W2068779852C163258240 @default.
- W2068779852 hasConceptScore W2068779852C17829176 @default.
- W2068779852 hasConceptScore W2068779852C192562407 @default.
- W2068779852 hasConceptScore W2068779852C194257627 @default.
- W2068779852 hasConceptScore W2068779852C196054291 @default.
- W2068779852 hasConceptScore W2068779852C2780992000 @default.
- W2068779852 hasConceptScore W2068779852C46362747 @default.
- W2068779852 hasConceptScore W2068779852C49040817 @default.
- W2068779852 hasConceptScore W2068779852C58112919 @default.
- W2068779852 hasConceptScore W2068779852C612350 @default.
- W2068779852 hasConceptScore W2068779852C62520636 @default.
- W2068779852 hasConceptScore W2068779852C74064498 @default.
- W2068779852 hasConceptScore W2068779852C82706917 @default.
- W2068779852 hasLocation W20687798521 @default.
- W2068779852 hasOpenAccess W2068779852 @default.
- W2068779852 hasPrimaryLocation W20687798521 @default.
- W2068779852 hasRelatedWork W1853777015 @default.
- W2068779852 hasRelatedWork W1966114314 @default.
- W2068779852 hasRelatedWork W1969383362 @default.
- W2068779852 hasRelatedWork W2026000982 @default.
- W2068779852 hasRelatedWork W2035814271 @default.
- W2068779852 hasRelatedWork W2042204013 @default.
- W2068779852 hasRelatedWork W2048472725 @default.
- W2068779852 hasRelatedWork W2149497678 @default.
- W2068779852 hasRelatedWork W2156294920 @default.
- W2068779852 hasRelatedWork W2167057518 @default.
- W2068779852 hasRelatedWork W2233046400 @default.
- W2068779852 hasRelatedWork W2893949581 @default.
- W2068779852 hasRelatedWork W3002902580 @default.
- W2068779852 hasRelatedWork W2150874624 @default.
- W2068779852 hasRelatedWork W2252749630 @default.
- W2068779852 hasRelatedWork W2318462330 @default.
- W2068779852 hasRelatedWork W2825797083 @default.
- W2068779852 hasRelatedWork W2831737172 @default.
- W2068779852 hasRelatedWork W2880504595 @default.
- W2068779852 hasRelatedWork W2929334621 @default.
- W2068779852 isParatext "false" @default.
- W2068779852 isRetracted "false" @default.
- W2068779852 magId "2068779852" @default.
- W2068779852 workType "article" @default.