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- W2068803414 abstract "The energy distribution curves of secondary ions are affected by the chemical state of surface atoms. Variations in these distributions due to changing chemistry were used to construct chemical state profiles of surface layers. Factor analysis of Ta+ energy distribution curves, recorded while sputter profiling anodized tantalum, is shown to provide quantitative profiles of the two chemical states of tantalum present in the oxide/metal structure." @default.
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- W2068803414 title "Chemical state depth profiles from SIMS ion energy distributions using factor analysis" @default.
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