Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068805978> ?p ?o ?g. }
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- W2068805978 endingPage "191" @default.
- W2068805978 startingPage "189" @default.
- W2068805978 abstract "A fast diffusing species of ion-implanted arsenic has been observed in silicon dioxide annealed in a nitrogen annealing ambient. Below 1020 cm−3 concentration this arsenic diffuses 20× faster at 1100 °C than the slow arsenic found in oxidizing ambient. The effective activation energy of diffusion of this fast arsenic is 0.71 eV, in sharp contrast to 4.3 and 4.0 eV for the slow arsenic in O2 and O2 /H2 O, respectively. The fast species is believed to be arsenic occupying either the oxygen site or interstitial site in the SiO2 network." @default.
- W2068805978 created "2016-06-24" @default.
- W2068805978 creator A5066108897 @default.
- W2068805978 creator A5077196080 @default.
- W2068805978 date "1988-07-18" @default.
- W2068805978 modified "2023-09-26" @default.
- W2068805978 title "Fast diffusion component of ion‐implanted arsenic in thermally grown silicon dioxide" @default.
- W2068805978 cites W1969732199 @default.
- W2068805978 cites W2020648655 @default.
- W2068805978 cites W2059803447 @default.
- W2068805978 cites W2076641673 @default.
- W2068805978 cites W2999990670 @default.
- W2068805978 doi "https://doi.org/10.1063/1.100583" @default.
- W2068805978 hasPublicationYear "1988" @default.
- W2068805978 type Work @default.
- W2068805978 sameAs 2068805978 @default.
- W2068805978 citedByCount "2" @default.
- W2068805978 crossrefType "journal-article" @default.
- W2068805978 hasAuthorship W2068805978A5066108897 @default.
- W2068805978 hasAuthorship W2068805978A5077196080 @default.
- W2068805978 hasConcept C107872376 @default.
- W2068805978 hasConcept C113196181 @default.
- W2068805978 hasConcept C121332964 @default.
- W2068805978 hasConcept C145148216 @default.
- W2068805978 hasConcept C177322064 @default.
- W2068805978 hasConcept C178790620 @default.
- W2068805978 hasConcept C179104552 @default.
- W2068805978 hasConcept C185592680 @default.
- W2068805978 hasConcept C191897082 @default.
- W2068805978 hasConcept C192562407 @default.
- W2068805978 hasConcept C2777855556 @default.
- W2068805978 hasConcept C2779089622 @default.
- W2068805978 hasConcept C41823505 @default.
- W2068805978 hasConcept C502230775 @default.
- W2068805978 hasConcept C540031477 @default.
- W2068805978 hasConcept C544956773 @default.
- W2068805978 hasConcept C69357855 @default.
- W2068805978 hasConcept C77176794 @default.
- W2068805978 hasConcept C97355855 @default.
- W2068805978 hasConceptScore W2068805978C107872376 @default.
- W2068805978 hasConceptScore W2068805978C113196181 @default.
- W2068805978 hasConceptScore W2068805978C121332964 @default.
- W2068805978 hasConceptScore W2068805978C145148216 @default.
- W2068805978 hasConceptScore W2068805978C177322064 @default.
- W2068805978 hasConceptScore W2068805978C178790620 @default.
- W2068805978 hasConceptScore W2068805978C179104552 @default.
- W2068805978 hasConceptScore W2068805978C185592680 @default.
- W2068805978 hasConceptScore W2068805978C191897082 @default.
- W2068805978 hasConceptScore W2068805978C192562407 @default.
- W2068805978 hasConceptScore W2068805978C2777855556 @default.
- W2068805978 hasConceptScore W2068805978C2779089622 @default.
- W2068805978 hasConceptScore W2068805978C41823505 @default.
- W2068805978 hasConceptScore W2068805978C502230775 @default.
- W2068805978 hasConceptScore W2068805978C540031477 @default.
- W2068805978 hasConceptScore W2068805978C544956773 @default.
- W2068805978 hasConceptScore W2068805978C69357855 @default.
- W2068805978 hasConceptScore W2068805978C77176794 @default.
- W2068805978 hasConceptScore W2068805978C97355855 @default.
- W2068805978 hasIssue "3" @default.
- W2068805978 hasLocation W20688059781 @default.
- W2068805978 hasOpenAccess W2068805978 @default.
- W2068805978 hasPrimaryLocation W20688059781 @default.
- W2068805978 hasRelatedWork W1977469431 @default.
- W2068805978 hasRelatedWork W2009252896 @default.
- W2068805978 hasRelatedWork W2018005569 @default.
- W2068805978 hasRelatedWork W2020648655 @default.
- W2068805978 hasRelatedWork W2044409345 @default.
- W2068805978 hasRelatedWork W2046953599 @default.
- W2068805978 hasRelatedWork W2050041811 @default.
- W2068805978 hasRelatedWork W2094221410 @default.
- W2068805978 hasRelatedWork W2118220371 @default.
- W2068805978 hasRelatedWork W2935944697 @default.
- W2068805978 hasVolume "53" @default.
- W2068805978 isParatext "false" @default.
- W2068805978 isRetracted "false" @default.
- W2068805978 magId "2068805978" @default.
- W2068805978 workType "article" @default.