FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2068854787> ?p ?o ?g. }

• W2068854787 endingPage "25" @default.
• W2068854787 startingPage "18" @default.
• W2068854787 abstract "Thin Co(W,P) films, 100–200 nm thick, were electroless deposited on oxidized silicon wafers using sputtered copper or cobalt as catalytic seed layers. The purpose of these films is to encapsulate copper preventing its corrosion or to serve as a diffusion barrier against copper contamination of silicon oxide and silicon in ULSI interconnect and packaging applications. The electroless cobalt layers were integrated with electroless copper and found to function as barriers up to a temperature of 500°C. The microstructure of the barrier film was found to consist of grains of h.c.p. cobalt, ∼10 nm in diameter, in which the grain boundaries are most probably enriched by phosphorus and tungsten. It was found that the phosphorus and tungsten impurities stabilize the h.c.p. phase, postponing the transition to the f.c.c. phase by more than 80°C, compared to pure bulk cobalt. The observed good barrier properties can be explained by the nano-sized grains along with the blocking effect of the impurities at the fast diffusion path of the grain boundaries. An advantage of these layers, relative to alternative diffusion barriers for copper, is their low electrical resistivity, 40 μΩ cm." @default.
• W2068854787 created "2016-06-24" @default.
• W2068854787 creator A5006073913 @default.
• W2068854787 creator A5017088067 @default.
• W2068854787 creator A5038105758 @default.
• W2068854787 creator A5058600369 @default.
• W2068854787 date "2001-04-01" @default.
• W2068854787 modified "2023-09-29" @default.
• W2068854787 title "Characterization of electroless deposited Co(W,P) thin films for encapsulation of copper metallization" @default.
• W2068854787 cites W1597355861 @default.
• W2068854787 cites W1977411898 @default.
• W2068854787 cites W1978724167 @default.
• W2068854787 cites W1981828999 @default.
• W2068854787 cites W1982088195 @default.
• W2068854787 cites W1982808500 @default.
• W2068854787 cites W2002651922 @default.
• W2068854787 cites W2010009345 @default.
• W2068854787 cites W2015080656 @default.
• W2068854787 cites W2020026280 @default.
• W2068854787 cites W2026965293 @default.
• W2068854787 cites W2028793278 @default.
• W2068854787 cites W2057892646 @default.
• W2068854787 cites W2083605361 @default.
• W2068854787 cites W2098718909 @default.
• W2068854787 cites W2121771181 @default.
• W2068854787 cites W2133331489 @default.
• W2068854787 cites W2477983802 @default.
• W2068854787 doi "https://doi.org/10.1016/s0921-5093(00)01348-4" @default.
• W2068854787 hasPublicationYear "2001" @default.
• W2068854787 type Work @default.
• W2068854787 sameAs 2068854787 @default.
• W2068854787 citedByCount "105" @default.
• W2068854787 countsByYear W20688547872012 @default.
• W2068854787 countsByYear W20688547872013 @default.
• W2068854787 countsByYear W20688547872014 @default.
• W2068854787 countsByYear W20688547872015 @default.
• W2068854787 countsByYear W20688547872016 @default.
• W2068854787 countsByYear W20688547872017 @default.
• W2068854787 countsByYear W20688547872018 @default.
• W2068854787 countsByYear W20688547872019 @default.
• W2068854787 countsByYear W20688547872021 @default.
• W2068854787 countsByYear W20688547872022 @default.
• W2068854787 countsByYear W20688547872023 @default.
• W2068854787 crossrefType "journal-article" @default.
• W2068854787 hasAuthorship W2068854787A5006073913 @default.
• W2068854787 hasAuthorship W2068854787A5017088067 @default.
• W2068854787 hasAuthorship W2068854787A5038105758 @default.
• W2068854787 hasAuthorship W2068854787A5058600369 @default.
• W2068854787 hasConcept C127413603 @default.
• W2068854787 hasConcept C159985019 @default.
• W2068854787 hasConcept C160671074 @default.
• W2068854787 hasConcept C171250308 @default.
• W2068854787 hasConcept C178790620 @default.
• W2068854787 hasConcept C185592680 @default.
• W2068854787 hasConcept C191897082 @default.
• W2068854787 hasConcept C192562407 @default.
• W2068854787 hasConcept C2778836790 @default.
• W2068854787 hasConcept C2779227376 @default.
• W2068854787 hasConcept C2779851234 @default.
• W2068854787 hasConcept C42360764 @default.
• W2068854787 hasConcept C47908070 @default.
• W2068854787 hasConcept C515602321 @default.
• W2068854787 hasConcept C542268612 @default.
• W2068854787 hasConcept C544778455 @default.
• W2068854787 hasConcept C544956773 @default.
• W2068854787 hasConcept C71987851 @default.
• W2068854787 hasConcept C87976508 @default.
• W2068854787 hasConceptScore W2068854787C127413603 @default.
• W2068854787 hasConceptScore W2068854787C159985019 @default.
• W2068854787 hasConceptScore W2068854787C160671074 @default.
• W2068854787 hasConceptScore W2068854787C171250308 @default.
• W2068854787 hasConceptScore W2068854787C178790620 @default.
• W2068854787 hasConceptScore W2068854787C185592680 @default.
• W2068854787 hasConceptScore W2068854787C191897082 @default.
• W2068854787 hasConceptScore W2068854787C192562407 @default.
• W2068854787 hasConceptScore W2068854787C2778836790 @default.
• W2068854787 hasConceptScore W2068854787C2779227376 @default.
• W2068854787 hasConceptScore W2068854787C2779851234 @default.
• W2068854787 hasConceptScore W2068854787C42360764 @default.
• W2068854787 hasConceptScore W2068854787C47908070 @default.
• W2068854787 hasConceptScore W2068854787C515602321 @default.
• W2068854787 hasConceptScore W2068854787C542268612 @default.
• W2068854787 hasConceptScore W2068854787C544778455 @default.
• W2068854787 hasConceptScore W2068854787C544956773 @default.
• W2068854787 hasConceptScore W2068854787C71987851 @default.
• W2068854787 hasConceptScore W2068854787C87976508 @default.
• W2068854787 hasIssue "1" @default.
• W2068854787 hasLocation W20688547871 @default.
• W2068854787 hasOpenAccess W2068854787 @default.
• W2068854787 hasPrimaryLocation W20688547871 @default.
• W2068854787 hasRelatedWork W1974040521 @default.
• W2068854787 hasRelatedWork W1981544405 @default.
• W2068854787 hasRelatedWork W2032781719 @default.
• W2068854787 hasRelatedWork W2034701776 @default.
• W2068854787 hasRelatedWork W2064521431 @default.
• W2068854787 hasRelatedWork W2066737639 @default.
• W2068854787 hasRelatedWork W2125709210 @default.
• W2068854787 hasRelatedWork W2150486555 @default.

• next