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- W2068946906 abstract "The purpose of this paper is to report the results of a transmission-electron-microscopy (TEM) characterization of structural defects observed in a Czochralski-grown silicon crystal after a two-step anneal, i.e., 3 h at 700 °C and 1 h at 1000 °C. Six types of defects were identified, i.e., extrinsic stacking faults, microprecipitates on or near the plane of the stacking fault, particles, generator-dislocation loops, small strain centers, and a ’’new’’ precipitate structure, whose characterization is emphasized in this study. It was concluded that the new defect structure places the surrounding matrix in a compressive condition, i.e., it is of interstitial type. The possibility of carbon or oxygen being responsible for this precipitate structure was discussed. It was suggested that future electron energy-loss spectroscopy work should, in principle, distinguish between an oxide and a carbide." @default.
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- W2068946906 date "1978-07-01" @default.
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- W2068946906 title "Structural defects in annealed silicon containing oxygen" @default.
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- W2068946906 doi "https://doi.org/10.1063/1.325392" @default.
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