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- W2069049618 abstract "EUVL employs a reflective mask consisting of a metallized pattern less than 100 nm thick on a state-of-the-art multilayer mirror deposited on a substrate. The key technologies needed for mask fabrication are coating equipment to make defect-free multilayer films and a low- damage mask fabrication process. Current repair and inspection technologies are advanced enough to handle a pattern size of 0.3 micrometers ." @default.
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- W2069049618 date "1998-09-01" @default.
- W2069049618 modified "2023-10-16" @default.
- W2069049618 title "Mask technology of extreme-ultraviolet lithography" @default.
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- W2069049618 doi "https://doi.org/10.1117/12.328848" @default.
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