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- W2069083611 abstract "The electron beam exposure system, called EBES, has been used since 1974 to produce 1:1 chromium master masks for integrated circuits. The I.C design rules for VLSI require mask specifications approaching the limit of technology. Data is presented showing the variation of feature size on both macroscopic and microscopic scales. The parameters which impact upon the observed intra-die, inter-die and inter-mask dispersions are discussed. The presentation is slanted toward characteristics important to VLSI, both to serve as a guide to designers and to define those areas which most severely limit achievement of better feature size control." @default.
- W2069083611 created "2016-06-24" @default.
- W2069083611 creator A5072225026 @default.
- W2069083611 creator A5073820366 @default.
- W2069083611 date "1980-09-05" @default.
- W2069083611 modified "2023-09-26" @default.
- W2069083611 title "<title>Feature Size Variation Of Electron Beam Exposure System (EBES) Master Masks</title>" @default.
- W2069083611 doi "https://doi.org/10.1117/12.958631" @default.
- W2069083611 hasPublicationYear "1980" @default.
- W2069083611 type Work @default.
- W2069083611 sameAs 2069083611 @default.
- W2069083611 citedByCount "0" @default.
- W2069083611 crossrefType "proceedings-article" @default.
- W2069083611 hasAuthorship W2069083611A5072225026 @default.
- W2069083611 hasAuthorship W2069083611A5073820366 @default.
- W2069083611 hasConcept C119599485 @default.
- W2069083611 hasConcept C121332964 @default.
- W2069083611 hasConcept C127413603 @default.
- W2069083611 hasConcept C134146338 @default.
- W2069083611 hasConcept C134306372 @default.
- W2069083611 hasConcept C138885662 @default.
- W2069083611 hasConcept C14580979 @default.
- W2069083611 hasConcept C149635348 @default.
- W2069083611 hasConcept C151201525 @default.
- W2069083611 hasConcept C192562407 @default.
- W2069083611 hasConcept C2776401178 @default.
- W2069083611 hasConcept C2778334786 @default.
- W2069083611 hasConcept C33923547 @default.
- W2069083611 hasConcept C41008148 @default.
- W2069083611 hasConcept C41895202 @default.
- W2069083611 hasConcept C44870925 @default.
- W2069083611 hasConcept C530198007 @default.
- W2069083611 hasConceptScore W2069083611C119599485 @default.
- W2069083611 hasConceptScore W2069083611C121332964 @default.
- W2069083611 hasConceptScore W2069083611C127413603 @default.
- W2069083611 hasConceptScore W2069083611C134146338 @default.
- W2069083611 hasConceptScore W2069083611C134306372 @default.
- W2069083611 hasConceptScore W2069083611C138885662 @default.
- W2069083611 hasConceptScore W2069083611C14580979 @default.
- W2069083611 hasConceptScore W2069083611C149635348 @default.
- W2069083611 hasConceptScore W2069083611C151201525 @default.
- W2069083611 hasConceptScore W2069083611C192562407 @default.
- W2069083611 hasConceptScore W2069083611C2776401178 @default.
- W2069083611 hasConceptScore W2069083611C2778334786 @default.
- W2069083611 hasConceptScore W2069083611C33923547 @default.
- W2069083611 hasConceptScore W2069083611C41008148 @default.
- W2069083611 hasConceptScore W2069083611C41895202 @default.
- W2069083611 hasConceptScore W2069083611C44870925 @default.
- W2069083611 hasConceptScore W2069083611C530198007 @default.
- W2069083611 hasLocation W20690836111 @default.
- W2069083611 hasOpenAccess W2069083611 @default.
- W2069083611 hasPrimaryLocation W20690836111 @default.
- W2069083611 hasRelatedWork W15101102 @default.
- W2069083611 hasRelatedWork W1985627503 @default.
- W2069083611 hasRelatedWork W1997758026 @default.
- W2069083611 hasRelatedWork W2023269538 @default.
- W2069083611 hasRelatedWork W2027285416 @default.
- W2069083611 hasRelatedWork W2028307703 @default.
- W2069083611 hasRelatedWork W2035604861 @default.
- W2069083611 hasRelatedWork W2045325897 @default.
- W2069083611 hasRelatedWork W2050634715 @default.
- W2069083611 hasRelatedWork W2053183050 @default.
- W2069083611 hasRelatedWork W2053638554 @default.
- W2069083611 hasRelatedWork W2054520461 @default.
- W2069083611 hasRelatedWork W2058794496 @default.
- W2069083611 hasRelatedWork W2065429297 @default.
- W2069083611 hasRelatedWork W2065927495 @default.
- W2069083611 hasRelatedWork W2127089917 @default.
- W2069083611 hasRelatedWork W2326014694 @default.
- W2069083611 hasRelatedWork W2533983147 @default.
- W2069083611 hasRelatedWork W2976214775 @default.
- W2069083611 hasRelatedWork W3173419540 @default.
- W2069083611 isParatext "false" @default.
- W2069083611 isRetracted "false" @default.
- W2069083611 magId "2069083611" @default.
- W2069083611 workType "article" @default.