Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069122861> ?p ?o ?g. }
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- W2069122861 endingPage "264" @default.
- W2069122861 startingPage "257" @default.
- W2069122861 abstract "We present a fully integrated, single-crystal silicon (SCS), micromachined tunable resonator with a natural resonant frequency of nominally 1 MHz and a room temperature quality factor approaching 10,000 in vacuum. The microelectromechanical systems (MEMS) process used to create the SCS tunable resonators is fully compatible with VLSI technology. These resonators can be electrostatically excited and turned simultaneously or independently in both the x and y dimensions (in-plane), and can be further enhanced with a third dimension excitation (out-of-plane, z) and with reference marks (tips) for position detection in sensor applications. The dimensions of our microbeam tunable resonators are sub-micrometer in width and a few micrometers in height, with variable lengths ranging from 10 mu m to a few hundred mu m to achieve the desired natural (un-tuned) resonant frequencies. The prototype first generation tunable resonator has a measured out-of-plane (z) natural resonant frequency of 0.96 MHz and a quality factor of 4370. This resonator has a linear tuning range (with respect to the transverse (z) tuning force) of 60 kHz with a maximum required dc tuning voltage of 35 V. We describe the structure, the fabrication process, the frequency tuning, and the non-linear frequency response of the tunable resonators." @default.
- W2069122861 created "2016-06-24" @default.
- W2069122861 creator A5072153887 @default.
- W2069122861 creator A5082543121 @default.
- W2069122861 date "1995-09-01" @default.
- W2069122861 modified "2023-09-23" @default.
- W2069122861 title "A micromachined, single-crystal silicon, tunable resonator" @default.
- W2069122861 cites W1966160194 @default.
- W2069122861 cites W1967662119 @default.
- W2069122861 cites W1984539179 @default.
- W2069122861 cites W1985487629 @default.
- W2069122861 cites W1994075558 @default.
- W2069122861 cites W1995852178 @default.
- W2069122861 cites W1997427234 @default.
- W2069122861 cites W2005412040 @default.
- W2069122861 cites W2024309940 @default.
- W2069122861 cites W2040063094 @default.
- W2069122861 cites W2047274494 @default.
- W2069122861 cites W2058420233 @default.
- W2069122861 cites W2091681820 @default.
- W2069122861 cites W2156302071 @default.
- W2069122861 cites W2169532992 @default.
- W2069122861 cites W2177580458 @default.
- W2069122861 doi "https://doi.org/10.1088/0960-1317/5/3/009" @default.
- W2069122861 hasPublicationYear "1995" @default.
- W2069122861 type Work @default.
- W2069122861 sameAs 2069122861 @default.
- W2069122861 citedByCount "60" @default.
- W2069122861 countsByYear W20691228612012 @default.
- W2069122861 countsByYear W20691228612013 @default.
- W2069122861 countsByYear W20691228612015 @default.
- W2069122861 countsByYear W20691228612016 @default.
- W2069122861 countsByYear W20691228612017 @default.
- W2069122861 countsByYear W20691228612018 @default.
- W2069122861 countsByYear W20691228612019 @default.
- W2069122861 countsByYear W20691228612020 @default.
- W2069122861 crossrefType "journal-article" @default.
- W2069122861 hasAuthorship W2069122861A5072153887 @default.
- W2069122861 hasAuthorship W2069122861A5082543121 @default.
- W2069122861 hasConcept C120665830 @default.
- W2069122861 hasConcept C121332964 @default.
- W2069122861 hasConcept C136525101 @default.
- W2069122861 hasConcept C142724271 @default.
- W2069122861 hasConcept C145667562 @default.
- W2069122861 hasConcept C171635847 @default.
- W2069122861 hasConcept C187725362 @default.
- W2069122861 hasConcept C192562407 @default.
- W2069122861 hasConcept C204787440 @default.
- W2069122861 hasConcept C2777152588 @default.
- W2069122861 hasConcept C37977207 @default.
- W2069122861 hasConcept C49040817 @default.
- W2069122861 hasConcept C544956773 @default.
- W2069122861 hasConcept C71924100 @default.
- W2069122861 hasConcept C97126364 @default.
- W2069122861 hasConceptScore W2069122861C120665830 @default.
- W2069122861 hasConceptScore W2069122861C121332964 @default.
- W2069122861 hasConceptScore W2069122861C136525101 @default.
- W2069122861 hasConceptScore W2069122861C142724271 @default.
- W2069122861 hasConceptScore W2069122861C145667562 @default.
- W2069122861 hasConceptScore W2069122861C171635847 @default.
- W2069122861 hasConceptScore W2069122861C187725362 @default.
- W2069122861 hasConceptScore W2069122861C192562407 @default.
- W2069122861 hasConceptScore W2069122861C204787440 @default.
- W2069122861 hasConceptScore W2069122861C2777152588 @default.
- W2069122861 hasConceptScore W2069122861C37977207 @default.
- W2069122861 hasConceptScore W2069122861C49040817 @default.
- W2069122861 hasConceptScore W2069122861C544956773 @default.
- W2069122861 hasConceptScore W2069122861C71924100 @default.
- W2069122861 hasConceptScore W2069122861C97126364 @default.
- W2069122861 hasIssue "3" @default.
- W2069122861 hasLocation W20691228611 @default.
- W2069122861 hasOpenAccess W2069122861 @default.
- W2069122861 hasPrimaryLocation W20691228611 @default.
- W2069122861 hasRelatedWork W1498025844 @default.
- W2069122861 hasRelatedWork W1814590422 @default.
- W2069122861 hasRelatedWork W1988818220 @default.
- W2069122861 hasRelatedWork W2050408731 @default.
- W2069122861 hasRelatedWork W2073639403 @default.
- W2069122861 hasRelatedWork W2133189786 @default.
- W2069122861 hasRelatedWork W2136444029 @default.
- W2069122861 hasRelatedWork W2144031741 @default.
- W2069122861 hasRelatedWork W4242637793 @default.
- W2069122861 hasRelatedWork W1584520590 @default.
- W2069122861 hasVolume "5" @default.
- W2069122861 isParatext "false" @default.
- W2069122861 isRetracted "false" @default.
- W2069122861 magId "2069122861" @default.
- W2069122861 workType "article" @default.