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- W2069182675 abstract "Ablation of submicron structures on metals and semiconductors by short ultraviolet laser pulses (0.5 - 50 ps, 248 nm) is presented. Features like periodic line structures with a line-spacing below 400 nm, and holes with diameters well below 1 micrometers are produced on the sample surface by single laser shot exposure. The structures are projection printed by a Schwarzschild-objective (NA equals 0.4) in air environment. The dynamics of the surface modification has been studied using a pump-probe technique. The ablated grating structure is illuminated with a second, weak probe pulse (500 fs at 496 nm) whose diffracted light (0th, 1st, 2nd order signals) is recorded as a function of the delay between the two pulses. The results provide valuable time- resolved information about the change of the surface morphology." @default.
- W2069182675 created "2016-06-24" @default.
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- W2069182675 date "1998-08-19" @default.
- W2069182675 modified "2023-09-23" @default.
- W2069182675 title "Femtosecond UV-laser ablation of solid targets" @default.
- W2069182675 doi "https://doi.org/10.1117/12.320988" @default.
- W2069182675 hasPublicationYear "1998" @default.
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