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- W2069187546 abstract "A Fe2O3-based thin film gas sensor was made by cathodic sputtering from a pressed oxide target. A mixture of Ar-O was used as a sputtering gas. It was confirmed by X-ray diffraction that the iron oxide film consisted of the α-Fe2O3 phase only. The sensor is sensitive to many organic vapours and hydrogen without any noble metal catalyst. The working temperature of 350–400 °C is recommended for a sufficiently fast response of the sensor. No sensitivity to methane was found up to 0.5 vol.% at the temperature of 400°C." @default.
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- W2069187546 date "1994-06-01" @default.
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- W2069187546 title "Iron oxide thin film gas sensor" @default.
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- W2069187546 doi "https://doi.org/10.1016/0040-6090(94)90902-4" @default.
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