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- W2069208322 abstract "Post-metal annealing of aluminum gate metal-oxide-semiconductor capacitors can produce, as well as anneal, interface traps at the Si-SiO2 interface. The production mechanism is shown to be a thermal decomposition of passivated traps. Mechanisms involving interactions with atomic or molecular hydrogen are inconsistent with the experimental data." @default.
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- W2069208322 title "Si‐SiO<sub>2</sub>interface trap production by low‐temperature thermal processing" @default.
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